Zhu Gangyi, Li Jiaping, Li Jitao, Guo Jiyuan, Dai Jun, Xu Chunxiang, Wang Yongjin
Opt Lett. 2018 Feb 15;43(4):647-650. doi: 10.1364/OL.43.000647.
We fabricated a floating GaN microdisk supported by a silicon pillar through photolithography, dry-etching GaN, and isotropic wet-etching silicon methods. Single-mode ultraviolet whispering gallery mode (WGM) lasing was obtained from the floating GaN microdisk under optical pumping conditions at room temperature. The features of WGM lasing, i.e., the threshold, emission intensity, and lasing mode number, were characterized. A two-dimensional finite-difference time-domain simulation about the optical field contour profile also confirmed the resonance mechanism of WGM lasing. This work can help realize single-mode WGM lasing with high quality factor and low threshold.
我们通过光刻、干法蚀刻氮化镓和各向同性湿法蚀刻硅的方法,制造了一种由硅柱支撑的浮动氮化镓微盘。在室温下的光泵浦条件下,从浮动氮化镓微盘中获得了单模紫外回音壁模式(WGM)激光。对WGM激光的特性,即阈值、发射强度和激光模式数进行了表征。关于光场轮廓的二维时域有限差分模拟也证实了WGM激光的共振机制。这项工作有助于实现具有高品质因数和低阈值的单模WGM激光。