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基于 Si 衬底上 InGaN 微盘的整体多色激光发射。

Monolithically multi-color lasing from an InGaN microdisk on a Si substrate.

机构信息

Department of Electronic and Electrical Engineering, University of Sheffield, Sheffield, United Kingdom.

Department of Electrical and Electronic Engineering, University of Bristol, Bristol, United Kingdom.

出版信息

Sci Rep. 2017 Aug 30;7(1):10086. doi: 10.1038/s41598-017-10712-4.

DOI:10.1038/s41598-017-10712-4
PMID:28855663
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC5577231/
Abstract

An optically pumped multi-color laser has been achieved using an InGaN/GaN based micro-disk with an undercut structure on a silicon substrate. The micro-disk laser has been fabricated by means of a combination of a cost-effective microsphere lithography technique and subsequent dry/wet etching processes. The microdisk laser is approximately 1 μm in diameter. The structure was designed in such a way that the vertical components of the whispering gallery (WG) modes formed can be effectively suppressed. Consequently, three clean lasing peaks at 442 nm, 493 nm and 522 nm have been achieved at room temperature by simply using a continuous-wave diode laser as an optical pumping source. Time-resolved micro photoluminescence (PL) measurements have been performed in order to further confirm the lasing by investigating the excitonic recombination dynamics of these lasing peaks. A three dimensional finite-difference-time-domain (FDTD) simulation has been used for the structure design.

摘要

已使用具有硅衬底上的侧切结构的 InGaN/GaN 基微盘实现了光泵浦多色激光。微盘激光器是通过结合具有成本效益的微球光刻技术和随后的干法/湿法刻蚀工艺来制造的。微盘激光器的直径约为 1 μm。该结构的设计方式可以有效抑制 whispering gallery (WG) 模式的垂直分量。因此,通过简单地使用连续波二极管激光器作为光泵浦源,在室温下实现了三个干净的激光峰,分别在 442nm、493nm 和 522nm。为了进一步通过研究这些激光峰的激子复合动力学来确认激光,进行了时间分辨微光致发光 (PL) 测量。已使用三维有限差分时域 (FDTD) 模拟进行结构设计。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/f9f1/5577231/0d1413bed529/41598_2017_10712_Fig5_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/f9f1/5577231/baf3b65131c2/41598_2017_10712_Fig1_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/f9f1/5577231/f3670184160d/41598_2017_10712_Fig2_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/f9f1/5577231/6c8e7e15942e/41598_2017_10712_Fig3_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/f9f1/5577231/d3c9a98de142/41598_2017_10712_Fig4_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/f9f1/5577231/0d1413bed529/41598_2017_10712_Fig5_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/f9f1/5577231/baf3b65131c2/41598_2017_10712_Fig1_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/f9f1/5577231/f3670184160d/41598_2017_10712_Fig2_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/f9f1/5577231/6c8e7e15942e/41598_2017_10712_Fig3_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/f9f1/5577231/d3c9a98de142/41598_2017_10712_Fig4_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/f9f1/5577231/0d1413bed529/41598_2017_10712_Fig5_HTML.jpg

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本文引用的文献

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