Zhao Chenyang, Cheung Chifai, Liu Mingyu
Opt Express. 2018 Feb 19;26(4):4330-4345. doi: 10.1364/OE.26.004330.
This paper presents an integrated polar microstructure and template-matching method for optical position measurement that is developed based on the technology of ultra-precision machining (UPM) and computer vision. For computer vision, this paper makes use of the template-matching method as the basic working principle to match the position on the surface. For UPM, an optical microstructure that is named a 'polar microstructure' is purposely designed and fabricated by ultra-precision diamond machining technology to provide the high resolution of the position measurement. To demonstrate the performance of the proposed method for optical position measurement, a high-precision multi-sensor coordinate measuring machine was used to test the position accuracy and the length uncertainty for the two axes of this positioning method. The experimental results show that the average length uncertainty and the corresponding standard deviation errors are 109.6 nm and 76.4 nm on the X-axis, and 91.8 nm and 69.7 nm on the Y-axis, respectively.
本文提出了一种基于超精密加工（UPM）技术和计算机视觉开发的用于光学位置测量的集成极性微结构和模板匹配方法。对于计算机视觉，本文利用模板匹配方法作为基本工作原理来匹配表面上的位置。对于超精密加工，通过超精密金刚石加工技术特意设计并制造了一种名为“极性微结构”的光学微结构，以提供位置测量的高分辨率。为了证明所提出的光学位置测量方法的性能，使用高精度多传感器坐标测量机测试了该定位方法两个轴的位置精度和长度不确定度。实验结果表明，X轴上的平均长度不确定度和相应的标准偏差误差分别为109.6 nm和76.4 nm，Y轴上分别为91.8 nm和69.7 nm。
