Fu Wenpeng, Zhao Chenyang, Xue Wen, Li Changlin
School of Mechanical Engineering and Automation, Harbin Institute of Technology, Shenzhen, 518055, China.
Sci Rep. 2022 Aug 11;12(1):13651. doi: 10.1038/s41598-022-17209-9.
Vision-based precision measurement is limited by the optical resolution. Although various super-resolution algorithms have been developed, measurement precision and accuracy are difficult to guarantee. To achieve nanoscale resolution measurement, a super-resolution microstructure concept is proposed which is based on the idea of a strong mathematical mapping relationship that may exist between microstructure surface topography features and the corresponding image pixel intensities. In this work, a series of microgrooves are ultra-precision machined and their surface topographies and images are measured. A mapping relationship model is established to analyze the effect of the microgroove surface topography on the imaging mechanism. The results show that the surface roughness and surface defects of the microgroove have significant effects on predicting the imaging mechanism. The optimized machining parameters are determined afterward. This paper demonstrates a feasible and valuable work to support the design and manufacture super-resolution microstructure which has essential applications in precision positioning measurement.
基于视觉的精密测量受光学分辨率限制。尽管已开发出各种超分辨率算法，但测量精度和准确性仍难以保证。为实现纳米级分辨率测量，提出了一种超分辨率微结构概念，其基于微结构表面形貌特征与相应图像像素强度之间可能存在的强数学映射关系的思想。在这项工作中，一系列微槽被超精密加工，并测量了它们的表面形貌和图像。建立了映射关系模型以分析微槽表面形貌对成像机制的影响。结果表明，微槽的表面粗糙度和表面缺陷对预测成像机制有显著影响。随后确定了优化的加工参数。本文展示了一项可行且有价值的工作，以支持超分辨率微结构的设计和制造，其在精密定位测量中具有重要应用。
