Feng Meixin, He Junlei, Sun Qian, Gao Hongwei, Li Zengcheng, Zhou Yu, Liu Jianping, Zhang Shuming, Li Deyao, Zhang Liqun, Sun Xiaojuan, Li Dabing, Wang Huaibing, Ikeda Masao, Wang Rongxin, Yang Hui
Opt Express. 2018 Feb 19;26(4):5043-5051. doi: 10.1364/OE.26.005043.
Silicon photonics has been longing for an efficient on-chip light source that is electrically driven at room temperature. Microdisk laser featured with low-loss whispering gallery modes can emit directional lasing beam through a closely coupled on-chip waveguide efficiently, and hence is particularly suitable for photonics integration. The realization of electrically pumped III-nitride microdisk laser grown on Si has been impeded by the conventional undercut structure, poor material quality, and a limited quality of GaN microdisk formed by dry etching. Here we report a successful fabrication of room-temperature electrically pumped InGaN-based microdisk lasers grown on Si. A dramatic narrowing of the electroluminescence spectral line-width and a clear discontinuity in the slope of light output power plotted as a function of the injection current provide an unambiguous evidence of lasing. This is the first observation of electrically pumped lasing in InGaN-based microdisk lasers grown on Si at room temperature.
硅光子学一直渴望有一个能在室温下电驱动的高效片上光源。具有低损耗回音壁模式的微盘激光器可以通过紧密耦合的片上波导有效地发射定向激光束,因此特别适合光子集成。传统的底切结构、较差的材料质量以及干法蚀刻形成的氮化镓微盘质量有限,阻碍了在硅上生长的电泵浦III族氮化物微盘激光器的实现。在此,我们报告了在硅上成功制造出室温电泵浦的基于氮化铟镓的微盘激光器。电致发光光谱线宽的显著变窄以及作为注入电流函数绘制的光输出功率斜率的明显间断,提供了明确的激光发射证据。这是首次在室温下观察到在硅上生长的基于氮化铟镓的微盘激光器中的电泵浦激光发射。