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采用混合键合堆叠的第二代小像素技术

Second Generation Small Pixel Technology Using Hybrid Bond Stacking.

作者信息

Venezia Vincent C, Hsiung Alan Chih-Wei, Yang Wu-Zang, Zhang Yuying, Zhao Cheng, Lin Zhiqiang, Grant Lindsay A

机构信息

OmniVision Technologies, Inc., Santa Clara, CA 95054, USA.

出版信息

Sensors (Basel). 2018 Feb 24;18(2):667. doi: 10.3390/s18020667.

DOI:10.3390/s18020667
PMID:29495272
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC5855510/
Abstract

In this work, OmniVision's second generation (Gen2) of small-pixel BSI stacking technologies is reviewed. The key features of this technology are hybrid-bond stacking, deeper back-side, deep-trench isolation, new back-side composite metal-oxide grid, and improved gate oxide quality. This Gen2 technology achieves state-of-the-art low-light image-sensor performance for 1.1, 1.0, and 0.9 µm pixel products. Additional improvements on this technology include less than 100 ppm white-pixel process and a high near-infrared (NIR) QE technology.

摘要

在这项工作中，对豪威科技的第二代（Gen2）小像素背照式堆叠技术进行了综述。该技术的关键特性包括混合键合堆叠、更深的背面、深沟槽隔离、新型背面复合金属氧化物栅格以及改进的栅极氧化物质量。这种Gen2技术在1.1微米、1.0微米和0.9微米像素产品上实现了领先的低光图像传感器性能。该技术的其他改进包括低于100 ppm的白像素工艺和高近红外（NIR）量子效率技术。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0576/5855510/c180ad9e933b/sensors-18-00667-g011.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0576/5855510/4ef2b8b6c563/sensors-18-00667-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0576/5855510/d6bdb87f672e/sensors-18-00667-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0576/5855510/55785b9103a8/sensors-18-00667-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0576/5855510/cc5c3cc3f598/sensors-18-00667-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0576/5855510/872571a586d4/sensors-18-00667-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0576/5855510/ca04b0135f70/sensors-18-00667-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0576/5855510/bdc9608b1958/sensors-18-00667-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0576/5855510/5d7c5f5e5977/sensors-18-00667-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0576/5855510/46fc44e3c955/sensors-18-00667-g009.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0576/5855510/25a2e98deddc/sensors-18-00667-g010.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0576/5855510/c180ad9e933b/sensors-18-00667-g011.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0576/5855510/4ef2b8b6c563/sensors-18-00667-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0576/5855510/d6bdb87f672e/sensors-18-00667-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0576/5855510/55785b9103a8/sensors-18-00667-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0576/5855510/cc5c3cc3f598/sensors-18-00667-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0576/5855510/872571a586d4/sensors-18-00667-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0576/5855510/ca04b0135f70/sensors-18-00667-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0576/5855510/bdc9608b1958/sensors-18-00667-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0576/5855510/5d7c5f5e5977/sensors-18-00667-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0576/5855510/46fc44e3c955/sensors-18-00667-g009.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0576/5855510/25a2e98deddc/sensors-18-00667-g010.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0576/5855510/c180ad9e933b/sensors-18-00667-g011.jpg

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本文引用的文献

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