Lu Kai, Huang Wen, Guo Junxiong, Gong Tianxun, Wei Xiongbang, Lu Bing-Wei, Liu Si-Yi, Yu Bin
State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China, Chengdu, 610054, China.
State Key Laboratory of Luminescent Materials and Devices, South China University of Technology, Guangzhou, 510006, China.
Nanoscale Res Lett. 2018 Mar 14;13(1):83. doi: 10.1186/s11671-018-2492-7.
A flexible 4 × 4 sensor array with 16 micro-scale capacitive units has been demonstrated based on flexible piezoelectric poly(vinylidene fluoride) (PVDF) film. The piezoelectricity and surface morphology of the PVDF were examined by optical imaging and piezoresponse force microscopy (PFM). The PFM shows phase contrast, indicating clear interface between the PVDF and electrode. The electro-mechanical properties show that the sensor exhibits excellent output response and an ultra-high signal-to-noise ratio. The output voltage and the applied pressure possess linear relationship with a slope of 12 mV/kPa. The hold-and-release output characteristics recover in less than 2.5 μs, demonstrating outstanding electro-mechanical response. Additionally, signal interference between the adjacent arrays has been investigated via theoretical simulation. The results show the interference reduces with decreasing pressure at a rate of 0.028 mV/kPa, highly scalable with electrode size and becoming insignificant for pressure level under 178 kPa.
基于柔性压电聚偏二氟乙烯（PVDF）薄膜，展示了一种具有16个微尺度电容单元的柔性4×4传感器阵列。通过光学成像和压电响应力显微镜（PFM）研究了PVDF的压电性和表面形态。PFM显示出相位对比度，表明PVDF与电极之间有清晰的界面。机电性能表明，该传感器具有出色的输出响应和超高的信噪比。输出电压与施加压力呈线性关系，斜率为12 mV/kPa。保持和释放输出特性在不到2.5 μs内恢复，显示出出色的机电响应。此外，通过理论模拟研究了相邻阵列之间的信号干扰。结果表明，干扰随着压力降低以0.028 mV/kPa的速率减小，与电极尺寸高度相关，对于178 kPa以下的压力水平变得不显著。
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