Wang Binjun, Han Ying, Xu Shang, Qiu Lu, Ding Feng, Lou Jun, Lu Yang
Department of Mechanical and Biomedical Engineering, City University of Hong Kong, Hong Kong SAR, 999077, China.
Shenzhen Research Institute of City University of Hong Kong, Shenzhen, 518057, China.
Small. 2018 May;14(20):e1704085. doi: 10.1002/smll.201704085. Epub 2018 Apr 17.
As the critical feature sizes of integrated circuits approaching sub-10 nm, ultrathin gold nanowires (diameter <10 nm) have emerged as one of the most promising candidates for next-generation interconnects in nanoelectronics. Also due to their ultrasmall dimensions, however, the structures and morphologies of ultrathin gold nanowires are more prone to be damaged during practical services, for example, Rayleigh instability can significantly alter their morphologies upon Joule heating, hindering their applications as interconnects. Here, it is shown that upon mechanical perturbations, predamaged, nonuniform ultrathin gold nanowires can quickly recover into uniform diameters and restore their smooth surfaces, via a simple mechanically assisted self-healing process. By examining the local self-healing process through in situ high-resolution transmission electron microscopy, the underlying mechanism is believed to be associated with surface atomic diffusion as evidenced by molecular dynamics simulations. In addition, mechanical manipulation can assist the atoms to overcome the diffusion barriers, as suggested by ab initio calculations, to activate more surface adatoms to diffuse and consequently speed up the self-healing process. This result can provide a facile method to repair ultrathin metallic nanowires directly in functional devices, and quickly restore their microstructures and morphologies by simple global mechanical perturbations.
随着集成电路的关键特征尺寸接近亚10纳米,超薄金纳米线(直径<10纳米)已成为纳米电子学中下一代互连最有前途的候选材料之一。然而,由于其超小尺寸,超薄金纳米线的结构和形态在实际使用过程中更容易受损,例如,瑞利不稳定性在焦耳加热时会显著改变其形态,阻碍它们作为互连材料的应用。在此,研究表明,在机械扰动下,预先受损、不均匀的超薄金纳米线可以通过简单的机械辅助自修复过程迅速恢复到均匀直径并恢复其光滑表面。通过原位高分辨率透射电子显微镜检查局部自修复过程,其潜在机制被认为与表面原子扩散有关,分子动力学模拟证明了这一点。此外,从头算计算表明,机械操作可以帮助原子克服扩散势垒,激活更多表面吸附原子进行扩散,从而加快自修复过程。这一结果可以提供一种简便的方法,直接在功能器件中修复超薄金属纳米线,并通过简单的全局机械扰动快速恢复其微观结构和形态。