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三维打印微机电开关。

Three-Dimensionally Printed Micro-electromechanical Switches.

机构信息

School of Electrical Engineering , Kookmin University , Seoul 02707 , Korea.

Mechatronics R&D Center , Samsung Electronics , Hwaseong , Gyeonggi-do 18448 , Korea.

出版信息

ACS Appl Mater Interfaces. 2018 May 9;10(18):15841-15846. doi: 10.1021/acsami.8b01455. Epub 2018 Apr 30.

DOI:10.1021/acsami.8b01455
PMID:29688690
Abstract

Three-dimensional (3D) printers have attracted considerable attention from both industry and academia and especially in recent years because of their ability to overcome the limitations of two-dimensional (2D) processes and to enable large-scale facile integration techniques. With 3D printing technologies, complex structures can be created using only a computer-aided design file as a reference; consequently, complex shapes can be manufactured in a single step with little dependence on manufacturer technologies. In this work, we provide a first demonstration of the facile and time-saving 3D printing of two-terminal micro-electromechanical (MEM) switches. Two widely used thermoplastic materials were used to form 3D-printed MEM switches; freely suspended and fixed electrodes were printed from conductive polylactic acid, and a water-soluble sacrificial layer for air-gap formation was printed from poly(vinyl alcohol). Our 3D-printed MEM switches exhibit excellent electromechanical properties, with abrupt switching characteristics and an excellent on/off current ratio value exceeding 10. Therefore, we believe that our study makes an innovative contribution with implications for the development of a broader range of 3D printer applications (e.g., the manufacturing of various MEM devices and sensors), and the work highlights a uniquely attractive path toward the realization of 3D-printed electronics.

摘要

三维(3D)打印机因其能够克服二维(2D)工艺的局限性并实现大规模简便集成技术,引起了工业界和学术界的极大关注。利用 3D 打印技术,仅使用计算机辅助设计文件作为参考即可创建复杂结构;因此,可以在单个步骤中制造复杂形状,而几乎不依赖于制造商的技术。在这项工作中,我们首次展示了简便且省时的两终端微机电(MEM)开关的 3D 打印。两种广泛使用的热塑性材料被用于形成 3D 打印的 MEM 开关;导电聚乳酸用于打印自由悬浮和固定电极,而水溶性牺牲层用于形成气隙的打印聚(乙烯醇)。我们的 3D 打印的 MEM 开关表现出优异的机电性能,具有突然的开关特性和超过 10 的优异导通/关断电流比。因此,我们相信我们的研究为更广泛的 3D 打印机应用(例如各种 MEM 器件和传感器的制造)的发展做出了创新性贡献,并且这项工作突出了实现 3D 打印电子的一条极具吸引力的独特途径。

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