Opt Lett. 2018 Jun 1;43(11):2648-2651. doi: 10.1364/OL.43.002648.
Ion-implanted waveguides were directly written in bulk single-crystal diamond by scanning a focused 2 MeV proton beam. By controlling the fluence and the lateral size of the proton beam, a bright and near-circular single-mode profile was observed. Propagation loss and effective refractive index of the guided mode were measured by the Fabry-Pérot technique, confirming single-mode guiding. Micro-Raman maps of the waveguides were used to visualize damage profiles and defect distributions induced by the proton beam. The demonstration of single-mode light guiding in our waveguides shows that direct proton beam writing is a promising tool in the rapid manufacture of integrated optical circuits in bulk diamond.
通过扫描聚焦的 2MeV 质子束，在块状单晶金刚石中直接写入离子注入波导。通过控制质子束的通量和横向尺寸，观察到了明亮且近乎圆形的单模轮廓。通过法布里-珀罗技术测量了导模的传播损耗和有效折射率，证实了单模导光。波导的微拉曼图谱用于可视化质子束诱导的损伤轮廓和缺陷分布。我们的波导中单模光导的演示表明，直接质子束写入是在块状金刚石中快速制造集成光路的有前途的工具。
