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米尺度单壁碳纳米管薄膜的连续制造及其在柔性透明集成电路中的应用。

Continuous Fabrication of Meter-Scale Single-Wall Carbon Nanotube Films and their Use in Flexible and Transparent Integrated Circuits.

机构信息

Shenyang National Laboratory for Materials Science, Institute of Metal Research, Chinese Academy of Sciences, 72 Wenhua Road, Shenyang, 110016, P. R. China.

School of Material Science and Engineering, University of Science and Technology of China, 96 Jinzhai Road, Hefei, 230026, P. R. China.

出版信息

Adv Mater. 2018 Aug;30(32):e1802057. doi: 10.1002/adma.201802057. Epub 2018 Jun 27.

Abstract

Single-wall carbon nanotubes (SWCNTs), especially in the form of large-area and high-quality thin films, are a promising material for use in flexible and transparent electronics. Here, a continuous synthesis, deposition, and transfer technique is reported for the fabrication of meter-scale SWCNT thin films, which have an excellent optoelectrical performance including a low sheet resistance of 65 Ω/◽ with a transmittance of 90% at a wavelength of 550 nm. Using these SWCNT thin films, high-performance all-CNT thin-film transistors and integrated circuits are demonstrated, including 101-stage ring oscillators. The results pave the way for the future development of large-scale, flexible, and transparent electronics based on CNT thin films.

摘要

单壁碳纳米管(SWCNTs),特别是大面积和高质量的薄膜形式,是一种很有前途的用于柔性透明电子学的材料。在这里,报道了一种连续的合成、沉积和转移技术,用于制造米级 SWCNT 薄膜,其具有出色的光电性能,包括在 550nm 波长下透光率为 90%时的低方阻 65Ω/◽。使用这些 SWCNT 薄膜,展示了高性能的全 CNT 薄膜晶体管和集成电路,包括 101 级环形振荡器。这些结果为基于 CNT 薄膜的大规模、柔性和透明电子产品的未来发展铺平了道路。

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