College of Information Science and Engineering, State Key Laboratory of Synthetical Automation for Process Industries, Northeastern University, Shenyang 110819, China.
Best on Earth (BOE) Technol Grp Co Ltd., Beijing 100176, China.
Sensors (Basel). 2019 Nov 27;19(23):5194. doi: 10.3390/s19235194.
Flexible pressure sensors are important components of electronic skin and flexible wearable devices. Most existing piezoresistive flexible pressure sensors have obtained high sensitivities, however, they have relatively small pressure detection ranges. Here, we report flexible pressure sensors with a wide detection range using polydimethylsiloxane (PDMS) as the substrate, carbon nanotube films as the electrode material, and self-assembled polystyrene microsphere film as the microstructure layer. The obtained pressure sensor had a sandwich structure, and had a wide pressure detection range (from 4 kPa to 270 kPa), a sensitivity of 2.49 kPa, and a response time of tens of milliseconds. Two hundred load-unload cycles indicated that the device had good stability. In addition, the sensor was obtained by large-area fabrication with a low power consumption. This pressure sensor is expected to be widely used in applications such as electronic skin and flexible wearable devices.
柔性压力传感器是电子皮肤和柔性可穿戴设备的重要组成部分。大多数现有的压阻式柔性压力传感器已经具有较高的灵敏度，但它们的压力检测范围相对较小。在这里，我们报告了一种使用聚二甲基硅氧烷（PDMS）作为基底、碳纳米管薄膜作为电极材料和自组装聚苯乙烯微球薄膜作为微结构层的具有宽检测范围的柔性压力传感器。所获得的压力传感器具有三明治结构，具有较宽的压力检测范围（从 4 kPa 到 270 kPa）、2.49 kPa 的灵敏度和数十毫秒的响应时间。两百次加载-卸载循环表明该器件具有良好的稳定性。此外，该传感器通过低功耗的大面积制造获得。这种压力传感器有望在电子皮肤和柔性可穿戴设备等应用中得到广泛应用。
