Opt Lett. 2018 Jul 15;43(14):3433-3436. doi: 10.1364/OL.43.003433.
We demonstrate an ultra-compact waveguide taper on a silicon nitride platform. The proposed taper provides a coupling efficiency of 95% at a length of 19.5 μm in comparison to the standard linear taper of length 50 μm, which connects a 10 μm wide waveguide to a 1 μm wide photonic wire. The taper has a spectral response >75% spanning over 800 nm and resilience to fabrication variations; ±200 nm change in taper and end waveguide width varies transmission by <5%. We experimentally demonstrate taper insertion loss of <0.1 dB/transition for a taper as short as 19.5 μm, and reduce the footprint of the photonic device by 50.8% compared to the standard adiabatic taper. To the best of our knowledge, the proposed taper is the shortest waveguide taper ever reported in silicon nitride.
我们在氮化硅平台上展示了一种超紧凑的波导锥。与连接 10μm 宽波导和 1μm 宽光子线的标准线性锥相比,所提出的锥在 19.5μm 的长度下提供了 95%的耦合效率,而标准线性锥的长度为 50μm。该锥具有 >75%的光谱响应,跨度超过 800nm,并且对制造变化具有弹性;锥和端波导宽度的 ±200nm 变化使传输变化 <5%。我们实验证明,对于最短为 19.5μm 的锥,其插入损耗<0.1dB/过渡,与标准的绝热锥相比,光子器件的占地面积减少了 50.8%。据我们所知,所提出的锥是氮化硅中报道的最短的波导锥。