基于简化闭环控制方法的高 Q 值 MEMS 陀螺仪敏感模式下的振动抑制。

Oscillation Suppression in the Sense Mode of a High-Q MEMS Gyroscope Using a Simplified Closed-Loop Control Method.

机构信息

Research & Development Institute, Northwestern Polytechnical University, Shenzhen 518057, China.

MOE Key Laboratory of Micro and Nano Systems for Aerospace, Northwestern Polytechnical University, Xi'an 710072, China.

出版信息

Sensors (Basel). 2018 Jul 27;18(8):2443. doi: 10.3390/s18082443.

DOI:10.3390/s18082443

PMID:30060486

原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC6111340/

Abstract

The oscillation of the sense mode of the micro-machined Coriolis vibratory gyroscope (MCVG) with high quality factor () is analyzed in this study and the corresponding force feedback control scheme is presented to suppress this oscillation. The controller consists of integrator and some filters, instead of the common but complicated demodulation and remodulation modules. Compared with using no oscillation suppression scheme, the proposed simplified oscillation suppression control scheme can achieve an improvement of the sense mode of the MCVG. The inband spectrum ripple of the angular rate output are improved from 51.4 dB to 4.23 × 10 dB. Correspondingly, these two performance parameters are improved by 370.4 and 186.2 times, which are higher than two orders of magnitude, respectively. Bias stability is improved from 9.72 deg/h to 2.5 deg/h. Test results prove that the proposed control scheme is effective in suppressing the oscillation.

摘要

本文分析了高品质因子 ( ) 的微机械科里奥利振动陀螺仪 (MCVG) 的敏感模式的振荡，并提出了相应的力反馈控制方案来抑制这种振荡。该控制器由积分器和一些滤波器组成，而不是常见但复杂的解调重调制模块。与不使用抑制振荡方案相比，所提出的简化抑制振荡控制方案可以提高 MCVG 的敏感模式性能。角速度输出的带内频谱纹波从 51.4 dB 提高到 4.23×10 dB。相应地，这两个性能参数分别提高了 370.4 倍和 186.2 倍，均高于两个数量级。偏置稳定性从 9.72 deg/h 提高到 2.5 deg/h。测试结果证明，所提出的控制方案能有效地抑制振荡。