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一种用于闭环模式匹配控制的MEMS陀螺仪数字校准技术。

A Digital Calibration Technique of MEMS Gyroscope for Closed-Loop Mode-Matching Control.

作者信息

Li Cheng, Yang Bo, Guo Xin, Wu Lei

机构信息

School of Instrument Science and Engineering, Southeast University, Nanjing 210096, China.

Key Laboratory of Micro-Inertial Instruments and Advanced Navigation Technology, Ministry of Education, Nanjing 210096, China.

出版信息

Micromachines (Basel). 2019 Jul 25;10(8):496. doi: 10.3390/mi10080496.

DOI:10.3390/mi10080496
PMID:31349662
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC6723335/
Abstract

A digital excitation-calibration technique of dual-mass MEMS gyroscope for closed-loop mode-matching control is presented in this paper. The technique, which takes advantage of the symmetrical amplitude response of MEMS gyroscope, exploits a two-side excitation signal to actuate the sense mode to obtain the corresponding DC tuning voltage. The structural characteristics of dual-mass decoupled MEMS gyroscope and the tuning principle of excitation-calibration technique are introduced firstly. Then, the scheme of digital excitation-calibration system for the real-time mode-matching control is presented. Simultaneously, open-loop analysis and closed-loop analysis are deduced, respectively, to analyze the sources of tuning error and system stability. To verify the validity of the scheme and theoretical analysis, the system model was established by SIMULINK. The simulation results are proved to be consistent with the theoretical analysis, verifying the feasibility of the digital excitation-calibration technique. The control algorithms of the system were implemented with a FPGA device. Experimental results demonstrate that digital excitation-calibration technique can realize mode-matching within 1 s. The prototype with real-time mode-matching control has a bias instability of 0.813 ∘ /h and an ARW (Angular Random Walk) of 0.0117 ∘ / h . Compared to the mode-mismatching condition, the bias instability and ARW are improved by 3.25 and 4.49 times respectively.

摘要

本文提出了一种用于闭环模式匹配控制的双质量MEMS陀螺仪数字激励校准技术。该技术利用MEMS陀螺仪的对称幅度响应，采用双边激励信号驱动敏感模式以获得相应的直流调谐电压。首先介绍了双质量解耦MEMS陀螺仪的结构特性和激励校准技术的调谐原理。然后，给出了用于实时模式匹配控制的数字激励校准系统方案。同时，分别推导了开环分析和闭环分析，以分析调谐误差来源和系统稳定性。为验证该方案和理论分析的有效性，利用SIMULINK建立了系统模型。仿真结果证明与理论分析一致，验证了数字激励校准技术的可行性。系统的控制算法采用FPGA器件实现。实验结果表明，数字激励校准技术可在1 s内实现模式匹配。具有实时模式匹配控制的原型机偏置不稳定性为0.813°/h，角随机游走（ARW）为0.0117°/h。与模式失配情况相比，偏置不稳定性和ARW分别提高了3.25倍和4.49倍。

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3
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The development of micromachined gyroscope structure and circuitry technology.微机械陀螺仪结构与电路技术的发展
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