Research Laboratory of Electronics, Massachusetts Institute of Technology, 77 Massachusetts Avenue, Cambridge, MA, 02139, USA.
Department of Electrical and Electronics Engineering, Koç University, Rumelifeneri Yolu, Sariyer, 34450, Istanbul, Turkey.
Nat Commun. 2018 Aug 1;9(1):3009. doi: 10.1038/s41467-018-05287-1.
Many optical systems require broadband filters with sharp roll-offs for efficiently splitting or combining light across wide spectra. While free space dichroic filters can provide broadband selectivity, on-chip integration of these high-performance filters is crucial for the scalability of photonic applications in multi-octave interferometry, spectroscopy, and wideband wavelength-division multiplexing. Here we present the theory, design, and experimental characterization of integrated, transmissive, 1 × 2 port dichroic filters using spectrally selective waveguides. Mode evolution through adiabatic transitions in the demonstrated filters allows for single cutoff and flat-top responses with low insertion losses and octave-wide simulated bandwidths. Filters with cutoffs around 1550 and 2100 nm are fabricated on a silicon-on-insulator platform with standard complementary metal-oxide-semiconductor processes. A filter roll-off of 2.82 dB nm is achieved while maintaining ultra-broadband operation. This new class of nanophotonic dichroic filters can lead to new paradigms in on-chip communications, sensing, imaging, optical synthesis, and display applications.
许多光学系统需要具有陡峭滚降的宽带滤波器,以便有效地在宽光谱范围内分光或合光。虽然自由空间分色镜可以提供宽带选择性,但这些高性能滤波器的芯片内集成对于多倍频程干涉测量、光谱学和宽带波分复用等光子应用的可扩展性至关重要。在这里,我们提出了使用光谱选择性波导的集成、透射式 1×2 端口分色镜的理论、设计和实验特性。通过所展示的滤波器中的绝热跃迁进行模式演化,可实现具有低插入损耗和 1 个倍频程模拟带宽的单截止和平顶响应。在具有标准互补金属氧化物半导体工艺的绝缘体上硅平台上制造了截止波长在 1550nm 和 2100nm 左右的滤波器。在保持超宽带工作的同时,实现了 2.82dBnm 的滤波器滚降。这种新型纳米光子分色镜可以为芯片内通信、传感、成像、光学合成和显示应用带来新的范例。