Wakayama Toshitaka, Takahashi Yuta, Ono Yuichi, Fujii Yusuke, Gisuji Takuya, Ogura Takuto, Shinozaki Natsumi, Yamauchi Shun, Shoji Misaki, Kawasaki Hiromu, Higashiguchi Takeshi, Yoshizawa Toru
Appl Opt. 2018 Jul 1;57(19):5371-5379. doi: 10.1364/AO.57.005371.
We demonstrate an inner surface profile measurement that has a smooth spatial distribution. A supercontinuum beam suppresses the speckle contrast to 22% and the standard deviation of the point cloud to 40%, compared to equivalent values obtained by use of a conventional green He-Ne laser at a wavelength of 543.5 nm. A compact probe for the inner surface profile measurements using the supercontinuum beam measures the depth removed by wear of a small hole in an automobile component. The radial spatial resolution was evaluated to be 2 μm, which was of the same order as the wavelength of the supercontinuum beam. The supercontinuum beam enables fivefold improvement of the radial spatial resolution compared to the monochromatic wavelength beam because of a reduction in speckle effects.
我们展示了一种具有平滑空间分布的内表面轮廓测量方法。与使用波长为543.5 nm的传统绿色氦氖激光器获得的等效值相比，超连续谱光束将散斑对比度抑制到22%，点云的标准偏差抑制到40%。一种使用超连续谱光束进行内表面轮廓测量的紧凑型探头测量了汽车部件中小孔磨损去除的深度。径向空间分辨率评估为2μm，与超连续谱光束的波长处于同一量级。由于散斑效应的降低，超连续谱光束使径向空间分辨率比单色波长光束提高了五倍。
