Dong Zhichao, Nai Weizhi
Appl Opt. 2018 Jul 1;57(19):5523-5532. doi: 10.1364/AO.57.005523.
In order to reduce the ripple-induced effect in subaperture polishing of high-power laser optics, the tool paths are investigated and optimized in this study. Various fragment-type curves (i.e., fractal and fractal-like unicursal curves) are designed as tool paths, and most importantly, a novel algorithm for generating a random fractal-like tool path is proposed in detail. Compared with scanning paths, fragment-type paths possess multi-directionality during multiple polishing iterations, which could better smooth the surface texture and restrain the polishing-induced surface ripples. In particular, the random fractal-like path exhibits high randomness, boundary adaption, and step-length arbitrariness, which make it more flexible and powerful for iterative polishing. Experiments were conducted on a computer numerical control machine, with conclusions that during iterative polishing, (1) the repetitive usage of a single fractal path would aggravate surface ripples; (2) the combination of multiple fractal paths or using the random fractal-like path can restrain surface ripples efficiently; and (3) pitch pads exhibit a better ripple-smoothing effect than polyurethane. The proposed random fractal-like path is a good prospect for the manufacture of high-power laser optics, which demands very low surface ripples.
为了减少高功率激光光学元件子孔径抛光中由波纹引起的影响,本研究对刀具路径进行了研究和优化。设计了各种片段型曲线(即分形和类分形单曲线)作为刀具路径,最重要的是,详细提出了一种生成随机类分形刀具路径的新算法。与扫描路径相比,片段型路径在多次抛光迭代过程中具有多方向性,能够更好地平滑表面纹理并抑制抛光引起的表面波纹。特别是,随机类分形路径具有高随机性、边界适应性和步长任意性,这使得它在迭代抛光中更加灵活和有效。在计算机数控机床上进行了实验,得出的结论是,在迭代抛光过程中,(1)单一分形路径的重复使用会加剧表面波纹;(2)多个分形路径的组合或使用随机类分形路径可以有效地抑制表面波纹;(3)沥青垫比聚氨酯表现出更好的波纹平滑效果。所提出的随机类分形路径在制造对表面波纹要求极低的高功率激光光学元件方面具有良好的前景。