Bergner Klaus, Müller Michael, Klas Robert, Limpert Jens, Nolte Stefan, Tünnerman Andreas
Appl Opt. 2018 Jul 20;57(21):5941-5947. doi: 10.1364/AO.57.005941.
Ultrashort laser pulses allow for in-volume processing of glass through non-linear absorption. This results in permanent material changes, largely independent of the processed glass, and it is of particular relevance for cleaving applications. In this paper, a laser with a wavelength of 1030 nm, pulse duration of 19 ps, repetition rate of 10 kHz, and burst regime consisting of either four or eight pulses, with an intra-burst pulse separation of 12.5 ns, is used. Subsequently, a Gaussian-Bessel focal line is generated in a fused silica substrate with the aid of an axicon configuration. We show how the structure of the modifications, including the length of material disruptions and affected zones, can be directly influenced by a reasonable choice of focus geometry, pulse energy, and burst regime. We achieve single-shot modifications with 2 μm in diameter and 7.6 mm in length, exceeding an aspect ratio of 1:3800. Furthermore, a maximum length of 10.8 mm could be achieved with a single shot.
超短激光脉冲可通过非线性吸收对玻璃进行体加工。这会导致材料发生永久性变化，很大程度上与被加工的玻璃无关，并且这对于切割应用尤为重要。在本文中，使用了一台波长为1030 nm、脉冲持续时间为19 ps、重复频率为10 kHz且由四个或八个脉冲组成的脉冲串模式（脉冲串内脉冲间隔为12.5 ns）的激光器。随后，借助轴棱锥配置在熔融石英基板中产生高斯 - 贝塞尔焦线。我们展示了如何通过合理选择聚焦几何形状、脉冲能量和脉冲串模式，直接影响改性结构，包括材料破坏长度和受影响区域。我们实现了直径为2 μm、长度为7.6 mm的单次改性，长宽比超过1:3800。此外，单次可实现的最大长度为10.8 mm。
