Bilgeri L M, Salazar Bloise F, Lu M, Wang S, Jakobi M, Koch A W
Institute for Measurement Systems and Sensor Technology, Technical University of Munich, Arcisstraße 21, Munich 80333, Germany.
Rev Sci Instrum. 2018 Aug;89(8):083701. doi: 10.1063/1.5029914.
Electronic speckle-pattern interferometry (ESPI) is a powerful tool for precise, full-field, and non-contact contouring of optically rough surfaces. Due to the interferometric principle, the sensitivity of ESPI is directly related to the involved wavelengths and is thereby a global parameter. Surfaces with a broad variation of phase gradients, as, for instance, a target with both smooth and comparatively steep areas, result in just partially resolvable fringe interferograms. In recent studies, spatial light modulators (SLMs) have been implemented to adapt the interferometric reference phase front to the measurement task and broaden or squeeze the fringe spacing locally in critical areas. This method is limited by diffraction effects, observable for all types of phase-only SLMs. We demonstrate a straight-forward model, describing the diffraction-based intensity distortions occurring in interferograms after wavefront adaptation. The aim is to characterize the intensity distortions by means of the proposed model and minimize their impact, especially with regard to phase-only spatial light modulation in ESPI. For validation, the modeled behavior of SLMs is compared to the experimental results, obtained for two different SLM designs. Finally, experiments are presented, which demonstrate a successful adaptation of the interferometric reference phase front in compliance with the boundary conditions determined by the model.
