Nanotechnology. 2018 Dec 7;29(49):495702. doi: 10.1088/1361-6528/aae0ad. Epub 2018 Sep 12.
Ultra-thin zirconia (ZrO) nanocrystal films were fabricated by using a controlled dip-coating process. ZrO nanocrystals possess a cubic crystalline phase and large surface-to-volume area. The film composite with only several layers of nanocrystals were obtained by controlling the withdrawal speed and mass concentration of the colloidal solution. The optical properties of ZrO nanocrystal films were accessed by UV-vis spectroscopy, which indicated the dense and uniform structure of the nanocrystal films. The high reflection index suggested that the films could be used in the reflection coating industry. Furthermore, a micro-pattern of self-assembled monolayers of silane molecular was used as a chemical mold for selective deposition of ZrO nanocrystals. As a result, a self-assembly patterning of ZrO nanocrystals with a neat edge was fabricated on silicon substrate. The low-cost fabricating method is compatible with conventional very-large-scale integration processes and can be extended to other kinds of nanocrystals.
采用控制浸涂工艺制备了超薄氧化锆（ZrO）纳米晶薄膜。ZrO 纳米晶具有立方晶相和较大的比表面积。通过控制提拉速度和胶体溶液的质量浓度，可以获得仅由几层纳米晶组成的薄膜复合材料。通过紫外可见光谱研究了 ZrO 纳米晶薄膜的光学性质，表明纳米晶薄膜具有致密均匀的结构。高反射率表明该薄膜可用于反射涂层工业。此外，硅烷分子的自组装单层微图案被用作 ZrO 纳米晶选择性沉积的化学模具。结果，在硅衬底上制备了具有整齐边缘的 ZrO 纳米晶的自组装图案。这种低成本的制造方法与传统的超大规模集成电路工艺兼容，并可扩展到其他类型的纳米晶。
