Materials Department, University of California Santa Barbara, Santa Barbara, California 93106-5050, USA; Materials Science and Engineering, Carnegie Mellon University, 5000 Forbes Avenue Wean Hall 3325, Pittsburgh, PA 15213, USA.
Materials Department, University of California Santa Barbara, Santa Barbara, California 93106-5050, USA.
Ultramicroscopy. 2018 Dec;195:93-100. doi: 10.1016/j.ultramic.2018.08.025. Epub 2018 Sep 1.
The advancement of materials science at the mesoscale requires improvements in both sampling volumes/areas and spatial resolution in order to make statistically significant measurements of microstructures that influence higher-order material properties, such as fatigue and fracture. Therefore, SEM-based techniques have become desirable due to improvements in imaging resolution, large sample handling capability, and flexibility for in-situ instrumentation. By using fast sampling of SEM electron detector signals, intrinsic beam scanning defects have been identified that are related to the response time of the SEM electron beam deflectors and electron detectors. Mitigation of these beam scanning defects using detector sampling approaches and an adaptive model for settling time is shown to produce higher resolution SEM images, at faster image acquisition times, with a means to quantify the different response functions for various beam deflectors and detectors including those for electrons and ions.
为了对影响更高阶材料性能（如疲劳和断裂）的微观结构进行具有统计学意义的测量，介观尺度上的材料科学的发展需要在采样体积/面积和空间分辨率方面取得改进。因此，基于 SEM 的技术由于成像分辨率的提高、大样本处理能力以及对原位仪器的灵活性而变得理想。通过快速采集 SEM 电子探测器信号，可以识别出与 SEM 电子束偏转器和电子探测器的响应时间有关的固有束扫描缺陷。使用探测器采样方法和settling time 的自适应模型来减轻这些束扫描缺陷，可以在更快的图像采集时间内生成更高分辨率的 SEM 图像，并提供一种方法来量化各种电子束偏转器和探测器（包括电子和离子）的不同响应函数。
