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基于标准光刻工艺制作的表面开槽结构的 8 通道激光阵列,通道间隔为 100GHz。

Eight-channel laser array with 100  GHz channel spacing based on surface-slotted structures fabricated by standard lithography.

出版信息

Opt Lett. 2018 Oct 15;43(20):4867-4870. doi: 10.1364/OL.43.004867.

DOI:10.1364/OL.43.004867
PMID:30320770
Abstract

An eight-channel laser array with 100 GHz channel spacing based on surface-slotted structures is demonstrated. Wavelength selection is realized by using a group of micrometer-order slots fabricated by standard lithography technology. An output power of over 14 mW and a side-mode suppression ratio of better than 35 dB for each laser within the array are achieved. A laser array without tuning for 100 GHz channel spacing by standard lithography was realized for the first time, to the best of our knowledge. The laser array can be used to enhance the capacity of communication links and provides a promising light source for photonic-integrated circuits.

摘要

我们展示了一种基于表面开槽结构的 8 通道、100GHz 信道间隔的激光阵列。通过使用一组由标准光刻技术制造的微米级槽来实现波长选择。在该阵列中的每个激光器都实现了超过 14mW 的输出功率和优于 35dB 的边模抑制比。据我们所知,这是首次实现了无需通过标准光刻技术调谐即可实现 100GHz 信道间隔的激光阵列。该激光阵列可用于提高通信链路的容量,并为光子集成电路提供有前途的光源。

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Eight-channel laser array with 100  GHz channel spacing based on surface-slotted structures fabricated by standard lithography.基于标准光刻工艺制作的表面开槽结构的 8 通道激光阵列,通道间隔为 100GHz。
Opt Lett. 2018 Oct 15;43(20):4867-4870. doi: 10.1364/OL.43.004867.
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