Sone Junji, Murakami Mutsuaki, Tatami Atsushi
Faculty of Engineering, Tokyo Polytechnic University, Atsugi 243-0297, Japan.
Material Solutions Research Institute, KANEKA Corporation, Torikai-Nishi 5-1-1, Settsu, Osaka 566-0072, Japan.
Micromachines (Basel). 2018 Feb 2;9(2):64. doi: 10.3390/mi9020064.
We aimed to develop a process for constructing a carbon-based microelectromechanical system (MEMS). First, we prepared a highly oriented pyrolytic graphite (HOPG) crystal microsheet by exfoliation. We fabricated cantilevers and a double-clamped beam by controlling the thickness of the HOPG microsheet using a MEMS process. Second, we used a graphite sheet with contour line adhesion by metal sputter deposition. Third, we used a highly accurate graphite sheet with face adhesion and laser cutting. The first resonance frequencies were evaluated. We confirmed improvement in values to 1/10 level of a quarts vibrator, high performance, and a simple structure.
我们旨在开发一种构建碳基微机电系统（MEMS）的工艺。首先，我们通过剥离制备了高度取向的热解石墨（HOPG）晶体微片。我们使用MEMS工艺控制HOPG微片的厚度，制造了悬臂梁和双端固支梁。其次，我们通过金属溅射沉积使用具有轮廓线附着力的石墨片。第三，我们使用具有面附着力和激光切割的高精度石墨片。评估了第一共振频率。我们确认其值提高到了石英振动器的1/10水平，具有高性能和简单的结构。
