Li Haiyang, Hao Guangbo, Kavanagh Richard C
School of Engineering-Electrical and Electronic Engineering, University College Cork, Cork, Ireland.
Micromachines (Basel). 2016 Feb 1;7(2):23. doi: 10.3390/mi7020023.
Based on the constraint and position identification (CPI) approach for synthesizing XYZ compliant parallel mechanisms (CPMs) and configuration modifications, this paper proposes a new fully-symmetrical XYZ CPM with desired motion characteristics such as reduced cross-axis coupling, minimized lost motion, and relatively small parasitic motion. The good motion characteristics arise from not only its symmetric configuration, but also the rigid linkages between non-adjacent rigid stages. Comprehensive kinematic analysis is carried out based on a series of finite element simulations over a motion range per axis less than ±5% of the beam length, which reveals that the maximum cross-axis coupling rate is less than 0.86%, the maximum lost motion rate is less than 1.20%, the parasitic rotations of the motion stage (MS) are in the order of 10 rad, and the parasitic translations of the three actuated stages (ASs) are in the order of 10 of the beam length (less than 0.3% of the motion range), where the beam slenderness ratio is larger than 20. Furthermore, the nonlinear analytical models of the primary translations of the XYZ CPM, including the primary translations of the MS and the ASs, are derived and validated to provide a quick design synthesis. Moreover, two practical design schemes of the proposed XYZ CPM are discussed with consideration of the manufacturability. The practical designs enable the XYZ CPM to be employed in many applications such as micro-/nano-positioning, micro-/nano-manufacturing and micro-/nano-assembly. Finally, a spatial high-precision translational system is presented based on the practical design schemes, taking the actuator and sensor integration into account.
基于用于合成XYZ柔顺并联机构（CPM）和构型修改的约束与位置识别（CPI）方法，本文提出了一种具有所需运动特性的新型全对称XYZ CPM，如降低的交叉轴耦合、最小化的空行程以及相对较小的寄生运动。良好的运动特性不仅源于其对称构型，还源于非相邻刚性阶段之间的刚性连杆。基于在每个轴小于梁长度±5%的运动范围内进行的一系列有限元模拟进行了全面的运动学分析，结果表明最大交叉轴耦合率小于0.86%，最大空行程率小于1.20%，运动平台（MS）的寄生旋转量级为10⁻⁶ rad，三个驱动平台（AS）的寄生平移量级为梁长度的10⁻⁶ （小于运动范围的0.3%），其中梁的长细比大于20。此外，推导并验证了XYZ CPM主要平移的非线性分析模型，包括MS和AS的主要平移，以提供快速的设计合成。此外，考虑到可制造性，讨论了所提出的XYZ CPM的两种实际设计方案。这些实际设计使XYZ CPM能够应用于许多领域，如微/纳米定位、微/纳米制造和微/纳米装配。最后，基于实际设计方案提出了一种空间高精度平移系统，同时考虑了致动器和传感器的集成。
