基于聚甲基丙烯酸甲酯材料的热雕刻技术数学建模与仿真研究
Mathematical Modelling and Simulation Research of Thermal Engraving Technology Based on PMMA Material.
作者信息
Han Xiaowei, Liu Xiaowei, Tian Li
机构信息
Key Laboratory of Micro-systems and Micro-structures Manufacturing, Harbin Institute of Technology, Harbin 150000, China.
出版信息
Micromachines (Basel). 2016 Feb 26;7(3):37. doi: 10.3390/mi7030037.
We proposed a thermal engraving technology based on heat transfer theory and polymer rheology in microfluidic field. Then, we established a 3D model of the thermal engraving process based on polymethyl methacrylate (PMMA) material. We could employ the model to analyze the influence of temperature and speed on microchannel processing through the finite element simulation. Thus, we gained the optimal processing parameters. The orthogonal experiments were carried out within the parameter ranges obtained by the simulation results. Finally, we fabricated the smooth microchannel, the average roughness of which was 0.3 μm, by using the optimal parameters. Furthermore, we examined the surface morphology and wettability. Our work provides a convenient technological support for a fast, low-cost, and large-scale manufacturing method of microfluidic chips.
我们提出了一种基于传热理论和聚合物流变学的微流控领域热刻蚀技术。然后，我们基于聚甲基丙烯酸甲酯（PMMA）材料建立了热刻蚀过程的三维模型。通过有限元模拟，我们可以利用该模型分析温度和速度对微通道加工的影响。从而获得了最佳加工参数。在模拟结果得到的参数范围内进行了正交实验。最后，利用最佳参数制作出了平均粗糙度为0.3μm的光滑微通道。此外，我们还研究了其表面形貌和润湿性。我们的工作为微流控芯片的快速、低成本、大规模制造方法提供了便利的技术支持。
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