Kim Jae Keon, Han Maeum, Kang Shin-Won, Kong Seong Ho, Jung Daewoong
Department of Sensor and Display Engineering, Kyungpook National University, Daegu 41566, Korea.
Aircraft System Technology Group, Korea Institute of Industrial Technology (KITECH), Daegu 42994, Korea.
Micromachines (Basel). 2018 Jun 29;9(7):329. doi: 10.3390/mi9070329.
A thermal convection-based accelerometer was fabricated, and its characteristics were analyzed in this study. To understand the thermal convection of the accelerometer, the Grashof and Prandtl number equations were analyzed. This study conducted experiments to improve not only the sensitivity, but also the frequency band. An accelerometer with a more voluminous cavity showed better sensitivity. In addition, when the accelerometer used a gas medium with a large density and small viscosity, its sensitivity also improved. On the other hand, the accelerometer with a narrow volume cavity that used a gas medium with a small density and large thermal diffusivity displayed a larger frequency band. In particular, this paper focused on a Z-axis response to extend the performance of the accelerometer.
本研究制作了一种基于热对流的加速度计，并对其特性进行了分析。为了解加速度计的热对流情况，对格拉晓夫数和普朗特数方程进行了分析。本研究进行了实验，不仅提高了灵敏度，还拓宽了频带。具有更大体积腔体的加速度计显示出更好的灵敏度。此外，当加速度计使用密度大、粘度小的气体介质时，其灵敏度也会提高。另一方面，具有窄体积腔体且使用密度小、热扩散率大的气体介质的加速度计显示出更大的频带。特别是，本文重点关注Z轴响应以扩展加速度计的性能。
