Lee Sang Hoon, Lee Sangyoon
Department of Mechanical Design and Production Engineering, Konkuk University, Seoul 05029, Korea.
Department of Mechanical Engineering, Konkuk University, Seoul 05029, Korea.
Sensors (Basel). 2020 Jul 4;20(13):3748. doi: 10.3390/s20133748.
This paper presents the fabrication by means of roll-to-roll slot-die coating and characterization of air gap-based cantilever type capacitive acceleration sensors. As the mass of the sensor moves in the opposite direction of the acceleration, a capacitance change occurs. The sensor is designed to have a six layers structure with an air gap. Fabrication of the air gap and cantilever was enabled by coating and removing water-soluble PVA. The bottom electrode, the dielectric layer, and the sacrificial layer were formed using the roll-to-roll slot-die coating technique. The spacer, the top electrode, and the structural layer were formed by spin coating. Several kinds of experiments were conducted for characterization of the fabricated sensor samples. Experimental results show that accelerations of up to 3.6 g can be sensed with an average sensitivity of 0.00856 %/g.
本文介绍了通过卷对卷狭缝模涂覆法制造气隙式悬臂型电容式加速度传感器及其特性。当传感器的质量块沿与加速度相反的方向移动时，会发生电容变化。该传感器设计为具有带气隙的六层结构。通过涂覆和去除水溶性聚乙烯醇（PVA）来形成气隙和悬臂。底部电极、介电层和牺牲层采用卷对卷狭缝模涂覆技术形成。间隔层、顶部电极和结构层通过旋涂形成。对制造的传感器样品进行了多种实验以进行表征。实验结果表明，该传感器能够检测到高达3.6 g的加速度，平均灵敏度为0.00856 %/g。
