玻璃基板上的行列（RC）寻址二维电容式微机械超声换能器（CMUT）阵列：初步结果。
A Row-Column (RC) Addressed 2D Capacitive Micromachined Ultrasonic Transducer (CMUT) Array on a Glass Substrate: Preliminary Results.
作者信息
Sanders Jean L, Wu Xun, Adelegan Oluwafemi J, Mahmud Marzana M, Yalcin Yamaner F, Gallippi Caterina M, Oralkan Omer
出版信息
Annu Int Conf IEEE Eng Med Biol Soc. 2018 Jul;2018:1-4. doi: 10.1109/EMBC.2018.8513028.
In this work, we present preliminary characterization results from a 32 x 32 row-column (RC) addressed 2D capacitive micromachined ultrasonic transducer (CMUT) array. The device was fabricated using anodic bonding on a borosilicate glass substrate, which eliminates the substrate - bottom electrode coupling previously observed in traditional CMUT RC arrays fabricated on silicon substrates. The characterization results were compared for the top and bottom electrodes and include impedance measurements, pulseecho impulse responses, and 2D scans of the pressure field using a calibrated hydrophone. The results showed that the array elements behave similarly when ground and hot electrodes were switched between the top and bottom electrodes for all of the measured parameters including device capacitance, center frequency, and pulse-echo response amplitude. The pressure scans verified the highly customizable nature of RC arrays by showing multiple active element configurations. A sample cross-sectional image of a metal target was also demonstrated.
在这项工作中，我们展示了一个32×32行列（RC）寻址的二维电容式微机械超声换能器（CMUT）阵列的初步表征结果。该器件是在硼硅酸盐玻璃基板上采用阳极键合工艺制造的，这消除了在硅基板上制造的传统CMUT RC阵列中先前观察到的基板-底部电极耦合现象。对顶部和底部电极的表征结果进行了比较，包括阻抗测量、脉冲回波脉冲响应以及使用校准水听器对压力场进行的二维扫描。结果表明，对于所有测量参数，包括器件电容、中心频率和脉冲回波响应幅度，当接地电极和热电极在顶部和底部电极之间切换时，阵列元件的表现相似。压力扫描通过展示多种有源元件配置，验证了RC阵列具有高度可定制的特性。还展示了一个金属靶的样本横截面图像。
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