IEEE Trans Ultrason Ferroelectr Freq Control. 2022 Jul;69(7):2318-2330. doi: 10.1109/TUFFC.2022.3172566. Epub 2022 Jun 30.
This article presents an imaging probe with a 256-element ultrawideband (UWB) 1-D capacitive micromachined ultrasonic transducer (CMUT) array designed for acoustic angiography (AA). This array was fabricated on a borosilicate glass wafer with a reduced bottom electrode and an additional central plate mass to achieve the broad bandwidth. A custom 256-channel handheld probe was designed and implemented with integrated low-noise amplifiers and supporting power circuitry. This probe was used to characterize the UWB CMUT, which has a functional 3-dB frequency band from 3.5 to 23.5 MHz. A mechanical index (MI) of 0.33 was achieved at 3.5 MHz at a depth of 11 mm. These promising measurements are then combined to demonstrate AA. The use of alternate amplitude modulation (aAM) combined with a frequency analysis of the measured transmit signal demonstrates the suitability of the UWB CMUT for AA. This is achieved by measuring only a low level of unwanted high-frequency harmonics in both the transmit signal and the reconstructed image in the areas other than the contrast bubbles.
本文提出了一种成像探头,该探头具有 256 个单元的超宽带 (UWB) 1-D 电容式微机械超声换能器 (CMUT) 阵列,专为声血管造影 (AA) 设计。该阵列是在硼硅酸盐玻璃晶圆上制造的,具有减小的底部电极和附加的中央板质量,以实现宽带宽。设计并实现了具有集成低噪声放大器和支持功率电路的定制 256 通道手持式探头。该探头用于表征 UWB CMUT,其功能 3-dB 带宽为 3.5 至 23.5 MHz。在 11mm 深度处,在 3.5 MHz 时实现了 0.33 的机械指数 (MI)。然后将这些有希望的测量结果结合起来进行 AA 演示。使用交替幅度调制 (aAM) 并结合测量的发射信号的频率分析,证明了 UWB CMUT 适用于 AA。这是通过在除对比气泡区域之外的区域中的发射信号和重建图像中仅测量低水平的不需要的高频谐波来实现的。