Khan Sharif, Scholz Daniel, Ordonez Juan S, Stieglitz Thomas
Annu Int Conf IEEE Eng Med Biol Soc. 2018 Jul;2018:2941-2944. doi: 10.1109/EMBC.2018.8512884.
This work presents reliability investigations of silicone gasket as solid underfill for interconnection interfaces in hybrid implant systems with high channel count flexible electrode arrays and hermetically packed electronics. The gasket is fabricated by laser structuring thin sheet of silicone rubber. The surface activation of silicone sheet ensures mechanical bonds with the mating surfaces thereby improving the mechanical stability of the assembly and the insulation of the interconnects. The gasket samples with $10 \times 10$ openings for interconnect pads, each with diameter of $270 \mu \mathrm {m}$ and a center to center pitch size of $490 \mu \mathrm {m}$, were sandwiched between a polyimide array and a metallized ceramic substrate. The gasket maintained high insulation impedance of $15 \pm 0.30 \mathrm {M}\Omega $ between the adjacent interconnects with markedly capacitive behavior (phase angle, $- 89 ^{\circ})$ after 17 weeks in soaked conditions under accelerated aging at $60 ^{\circ}\mathrm {C}$. The gasket also survived electrical stresses and sustained high impedance $(10.93 \mathrm {M}\Omega $ with phase angle of $- 88 ^{\circ})$ when subjected to constant 3 VDC for 100 days.
这项工作展示了用于具有高通道数柔性电极阵列和密封包装电子设备的混合植入系统中互连接口的固体底部填充硅橡胶垫圈的可靠性研究。该垫圈通过激光加工硅橡胶薄片制成。硅橡胶薄片的表面活化确保了与配合表面的机械结合,从而提高了组件的机械稳定性和互连的绝缘性。具有用于互连焊盘的10×10个开口的垫圈样品,每个开口直径为270μm,中心距尺寸为490μm,被夹在聚酰亚胺阵列和金属化陶瓷基板之间。在60°C加速老化的浸泡条件下17周后,垫圈在相邻互连之间保持了15±0.30MΩ的高绝缘阻抗,具有明显的电容性行为(相位角,-89°)。当施加恒定3VDC持续100天时,垫圈也经受住了电应力并保持了高阻抗(10.93MΩ, 相位角为-88°)。