Worsley Robyn, Pimpolari Lorenzo, McManus Daryl, Ge Ning, Ionescu Robert, Wittkopf Jarrid A, Alieva Adriana, Basso Giovanni, Macucci Massimo, Iannaccone Giuseppe, Novoselov Kostya S, Holder Helen, Fiori Gianluca, Casiraghi Cinzia
School of Chemistry , University of Manchester , Manchester M13 9PL , United Kingdom.
Dipartimento di Ingegneria dell'Informazione , Università di Pisa , Pisa 56122 , Italy.
ACS Nano. 2019 Jan 22;13(1):54-60. doi: 10.1021/acsnano.8b06464. Epub 2018 Nov 27.
A well-defined insulating layer is of primary importance in the fabrication of passive ( e.g., capacitors) and active ( e.g., transistors) components in integrated circuits. One of the most widely known two-dimensional (2D) dielectric materials is hexagonal boron nitride (hBN). Solution-based techniques are cost-effective and allow simple methods to be used for device fabrication. In particular, inkjet printing is a low-cost, noncontact approach, which also allows for device design flexibility, produces no material wastage, and offers compatibility with almost any surface of interest, including flexible substrates. In this work, we use water-based and biocompatible graphene and hBN inks to fabricate all-2D material and inkjet-printed capacitors. We demonstrate an areal capacitance of 2.0 ± 0.3 nF cm for a dielectric thickness of ∼3 μm and negligible leakage currents, averaged across more than 100 devices. This gives rise to a derived dielectric constant of 6.1 ± 1.7. The inkjet printed hBN dielectric has a breakdown field of 1.9 ± 0.3 MV cm. Fully printed capacitors with sub-micrometer hBN layer thicknesses have also been demonstrated. The capacitors are then exploited in two fully printed demonstrators: a resistor-capacitor (RC) low-pass filter and a graphene-based field effect transistor.
在集成电路中制造无源(如电容器)和有源(如晶体管)元件时,定义明确的绝缘层至关重要。六方氮化硼(hBN)是最广为人知的二维(2D)介电材料之一。基于溶液的技术具有成本效益,并且允许使用简单的方法来制造器件。特别是,喷墨打印是一种低成本、非接触式方法,它还具有器件设计灵活性高、不产生材料浪费以及与几乎任何感兴趣的表面(包括柔性基板)兼容的优点。在这项工作中,我们使用水基且具有生物相容性的石墨烯和hBN墨水来制造全二维材料并喷墨打印电容器。对于约3μm的介电厚度,我们展示了2.0±0.3 nF cm²的面积电容以及可忽略不计的泄漏电流,这是对100多个器件进行平均后的结果。由此得出的介电常数为6.1±1.7。喷墨打印的hBN电介质的击穿场强为1.9±0.3 MV cm²。还展示了具有亚微米hBN层厚度的全印刷电容器。然后,这些电容器被应用于两个全印刷演示器中:一个电阻 - 电容(RC)低通滤波器和一个基于石墨烯的场效应晶体管。