Department of Mechanical Engineering, National Chung Cheng University, Chiayi County 62102, Taiwan.
Advanced Institute of Manufacturing with High-Tech Innovations, National Chung Cheng University, Chiayi County 62102, Taiwan.
Sensors (Basel). 2018 Nov 20;18(11):4046. doi: 10.3390/s18114046.
This study proposes a novel FSM compensation system for four degrees of freedom (DOF) laser errors compensation, which has the advantage of shorter optical path length, fewer elements and an easier set-up process, meaning that it can be used at different locations. A commercial software, Zemax, is used to evaluate the function of the proposed FSM compensation system and the mathematical modelling of the proposed FSM compensation system is established by using a skew-ray tracing method. Finally, the proposed FSM compensation system is then verified experimentally using a laboratory-built prototype and the result shows that the proposed FSM compensation system achieves the ability to compensate the 4 DOF of the laser source.
本研究提出了一种新颖的四自由度(DOF)激光误差补偿的 FSM 补偿系统,它具有光路更短、元件更少和更容易设置的优点,这意味着它可以在不同的位置使用。采用商业软件 Zemax 来评估所提出的 FSM 补偿系统的功能,并采用斜光线追踪方法建立所提出的 FSM 补偿系统的数学模型。最后,使用实验室构建的原型对所提出的 FSM 补偿系统进行了实验验证,结果表明所提出的 FSM 补偿系统实现了补偿激光源 4 DOF 的能力。