Wang Yao, Yan Yichao, Jiang Hongchuan, Xing Zongren, Li Yong, Qin Wenzhi, Wang Liang, Guo Fei
State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China, Chengdu, 610054, China.
Institute of Chemical Materials, China Academy of Engineering Physics, Mianyang, 621900, China.
Nanoscale Res Lett. 2018 Nov 22;13(1):374. doi: 10.1186/s11671-018-2795-8.
In this study, energetic Al/Ni superlattice was deposited by magnetron sputtering. A micro-plasma generator was fabricated using the energetic Al/Ni superlattice. The cross-sectional micro-structure of the energetic Al/Ni superlattice was scanned by transmission electron microscopy. Results show that the superlattice is composed of Al layer and Ni layers, and its periodic structure is clearly visible. Moreover, the bilayer thickness is about 25 nm, which consists of about 15 nm Al layer and 10 nm Ni layer. The micro initiator was stimulated using a 0.22 μF capacitor charged at 2900-4100 V. The electrical behaviors were investigated by testing the current-voltage waveform, and the plasma generation was explored by ultra-high-speed camera and photodiode. The integrated micro generator exhibited remarkable electrical exploding phenomenon, leading to plasma generations at a small timescale. The plasma outputs reflected by flyer velocities were superior to that with a much thicker bilayer of 500 nm Al/Ni multilayer. The higher flyer velocity combined with Gurney energy model confirmed the chemical reaction of the Al/Ni superlattice structure contributed to plasma production in comparison with the Al/Ni multilayers. Overall, the energetic Al/Ni superlattice was expected to pave a promising avenue to improve the initiator efficiency at a lower energy investment.
在本研究中,通过磁控溅射沉积了含能铝镍超晶格。利用该含能铝镍超晶格制作了一个微等离子体发生器。采用透射电子显微镜对含能铝镍超晶格的横截面微观结构进行了扫描。结果表明,该超晶格由铝层和镍层组成,其周期性结构清晰可见。此外,双层厚度约为25nm,其中铝层约为15nm,镍层约为10nm。使用一个在2900 - 4100V下充电的0.22μF电容器对微引发器进行激励。通过测试电流 - 电压波形研究其电学行为,并通过超高速相机和光电二极管探索等离子体的产生。集成微发生器表现出显著的电爆炸现象,在短时间尺度内导致等离子体产生。由飞片速度反映的等离子体输出优于具有500nm厚铝镍多层膜的情况。较高的飞片速度与格尼能量模型相结合证实,与铝镍多层膜相比,铝镍超晶格结构的化学反应有助于等离子体的产生。总体而言,含能铝镍超晶格有望为以较低能量投入提高引发器效率开辟一条有前景的途径。