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退火温度对水热生长的ZnO纳米棒/-Si异质结二极管的形貌和电学性能的影响

Effect of Annealing Temperature on Morphology and Electrical Property of Hydrothermally-Grown ZnO Nanorods/-Si Heterojunction Diodes.

作者信息

Choi Jong Won, Lee Chang Min, Park Chae Hee, Lim Jun Hyung, Park Geun Chul, Joo Jinho

机构信息

School of Advanced Materials Science and Engineering, Sungkyunkwan University, Suwon, Kyunggi-do, 16419, South Korea.

Sungkyunkwan University Advanced Institute of Nano Technology (SAINT), Sungkyunkwan University, Suwon, Kyunggi-do, 16419, South Korea.

出版信息

J Nanosci Nanotechnol. 2019 Mar 1;19(3):1640-1644. doi: 10.1166/jnn.2019.16186.

DOI:10.1166/jnn.2019.16186
PMID:30469237
Abstract

In this study, ZnO nanorods (NRs) were synthesized using the hydrothermal method, and the effects of annealing temperature (150 °C-600 °C) on morphology, crystallinity, defects states of the NRs, and electrical property of the -type ZnO NRs/-type Si heterojunction diodes were investigated. No appreciable changes in the morphology and crystal structure of the ZnO NRs were observed with increasing annealing temperature up to 450 °C. As the temperature increased to 600 °C, the average length and diameter of the NRs decreased due to the partial melting and sintering in the NRs. From the X-ray photoelectron spectroscopy (XPS) results, the concentration of internal oxygen vacancies decreased with increasing annealing temperature to 450 °C due to thermal diffusion of oxygen vacancies to the surface. The electrical conductivity of the NRs increased to 450 °C, which was attributed to the increased crystallinity and low defects concentration (oxygen vacancy) in the NRs. Conversely, the electrical conductivity degraded at 600 °C due to the decreased effective contact area.

摘要

在本研究中,采用水热法合成了氧化锌纳米棒(NRs),并研究了退火温度(150℃-600℃)对NRs的形貌、结晶度、缺陷态以及n型氧化锌NRs/n型硅异质结二极管电学性能的影响。在退火温度升高至450℃之前,未观察到氧化锌NRs的形貌和晶体结构有明显变化。当温度升至600℃时,由于NRs内部的部分熔化和烧结,NRs的平均长度和直径减小。从X射线光电子能谱(XPS)结果来看,由于氧空位向表面的热扩散,内部氧空位的浓度随着退火温度升高至450℃而降低。NRs的电导率在450℃时升高,这归因于NRs结晶度的提高和缺陷浓度(氧空位)的降低。相反,在600℃时电导率下降,这是由于有效接触面积减小所致。

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