Walker Julian, Liu Tianning, Tendulkar Mohit, Burrows David N, DeRoo Casey T, Allured Ryan, Hertz Edward N, Cotroneo Vincenzo, Reid Paul B, Schwartz Eric D, Jackson Thomas N, Trolier-McKinstry Susan
Opt Express. 2018 Oct 15;26(21):27757-27772. doi: 10.1364/OE.26.027757.
Lynx, a next generation X-ray observatory concept currently under study, requires lightweight, high spatial resolution X-ray mirrors. Here we detail the development and fabrication of one of the candidate technologies for Lynx, piezoelectric adjustable X-ray optics. These X-ray mirrors are thin glass shell mirrors with Cr/Ir X-ray reflective coatings on the mirror side and piezoelectric thin film actuators on the actuator side. Magnetron sputtering was used to deposit metal electrodes and metal-oxide piezoelectric layers. The piezoelectric (Pb(ZrTi)NbO) was divided into 112 independent piezoelectric actuators, with 100% yield achieved. We discuss the fabrication procedure, residual thermal stresses and tuning of the Cr/Ir coating stress for the purposes of stress balancing.
山猫（Lynx）是目前正在研究的下一代X射线天文台概念，它需要轻质、高空间分辨率的X射线镜。在此，我们详细介绍了山猫的候选技术之一——压电可调X射线光学器件的开发和制造。这些X射线镜是薄玻璃壳镜，镜面一侧有Cr/Ir X射线反射涂层，驱动侧有压电薄膜致动器。采用磁控溅射沉积金属电极和金属氧化物压电层。压电材料（Pb(ZrTi)NbO）被分成112个独立的压电致动器，良品率达到100%。为了实现应力平衡，我们讨论了制造工艺、残余热应力以及Cr/Ir涂层应力的调整。
