Xu Jinshan, He Jun, Huang Wei, Xu Xizhen, Guo Kuikui, Zhang Zhe, Wang Yiping
Opt Express. 2018 Oct 29;26(22):28178-28186. doi: 10.1364/OE.26.028178.
We demonstrate a novel design and fabrication process for fiber-tip Fabry-Perot interferometric (FTFPI) pressure sensors which eliminates fringe envelopes in the reflection spectrum. The outer facet reflectivity and thickness of the FTFPI silica diaphragm were reduced through orthogonal rough-polishing of the fiber end facet. A silica FTFPI sample with a diaphragm thickness of ~10.7 μm was produced and tested under hydraulic pressures ranging from 0 to 30 MPa. The proposed sensor achieved a pressure sensitivity of -284 pm/MPa at 1555 nm and could be a valuable new tool for high pressure measurements.
我们展示了一种用于光纤尖端法布里-珀罗干涉（FTFPI）压力传感器的新颖设计和制造工艺，该工艺消除了反射光谱中的条纹包络。通过对光纤端面进行正交粗抛光，降低了FTFPI二氧化硅膜片的外端面反射率和厚度。制作了一个膜片厚度约为10.7μm的二氧化硅FTFPI样品，并在0至30MPa的液压下进行了测试。所提出的传感器在1555nm处实现了-284pm/MPa的压力灵敏度，可能成为高压测量中有价值的新工具。
