Liang Hao, Jia Pinggang, Liu Jia, Fang Guocheng, Li Zhe, Hong Yingping, Liang Ting, Xiong Jijun
Science and Technology on Electronic Test and Measurement Laboratory, North University of China, Taiyuan 030051, China.
Sensors (Basel). 2018 Mar 28;18(4):1011. doi: 10.3390/s18041011.
A diaphragm-free fiber-optic Fabry-Perot (FP) interferometric gas pressure sensor is designed and experimentally verified in this paper. The FP cavity was fabricated by inserting a well-cut fiber Bragg grating (FBG) and hollow silica tube (HST) from both sides into a silica casing. The FP cavity length between the ends of the SMF and HST changes with the gas density. Using temperature decoupling method to improve the accuracy of the pressure sensor in high temperature environments. An experimental system for measuring the pressure under different temperatures was established to verify the performance of the sensor. The pressure sensitivity of the FP gas pressure sensor is 4.28 nm/MPa with a high linear pressure response over the range of 0.1-0.7 MPa, and the temperature sensitivity is 14.8 pm/°C under the range of 20-800 °C. The sensor has less than 1.5% non-linearity at different temperatures by using temperature decoupling method. The simple fabrication and low-cost will help sensor to maintain the excellent features required by pressure measurement in high temperature applications.
本文设计并实验验证了一种无膜片光纤法布里-珀罗（FP）干涉式气体压力传感器。FP腔是通过从两侧将切割良好的光纤布拉格光栅（FBG）和空心石英管（HST）插入石英套管中制成的。单模光纤（SMF）和HST端部之间的FP腔长度随气体密度而变化。采用温度解耦方法提高压力传感器在高温环境下的精度。建立了一个用于测量不同温度下压力的实验系统，以验证传感器的性能。FP气体压力传感器的压力灵敏度为4.28 nm/MPa，在0.1 - 0.7 MPa范围内具有高线性压力响应，在20 - 800 °C范围内温度灵敏度为14.8 pm/°C。采用温度解耦方法后，该传感器在不同温度下的非线性度小于1.5%。其简单的制作工艺和低成本将有助于该传感器在高温应用中保持压力测量所需的优异特性。
