Lin Hongfeng, Liu Fufei, Guo Huiyong, Zhou Ai, Dai Yutang
Opt Express. 2018 Oct 29;26(22):28763-28772. doi: 10.1364/OE.26.028763.
We have presented and demonstrated a fiber optic gas pressure sensor with ultra-high sensitivity based on Vernier effect. The sensor is composed of two integrated parallel Mach-Zehnder interferometers (MZIs) which are fabricated by fusion splicing a short section of dual side-hole fiber (DSHF) in between two short pieces of multimode fibers (MMFs). Femtosecond laser is applied for cutting off part of the MMF and drilling openings on one air hole of the DSHF to achieve magnified gas pressure measurement by Vernier effect. Experimental results show that the gas pressure sensitivity can be enhanced to about -60 nm/MPa in the range of 0-0.8 MPa. In addition, the structure possesses a low temperature cross-sensitivity of about 0.55 KPa/°C. This presented sensor has practically value in gas pressure detection, environmental monitoring and other industrial applications.
我们已经展示并演示了一种基于游标效应的超高灵敏度光纤气体压力传感器。该传感器由两个集成的平行马赫-曾德尔干涉仪（MZI）组成，通过在两段短多模光纤（MMF）之间熔接一小段双侧孔光纤（DSHF）来制造。应用飞秒激光切断部分MMF并在DSHF的一个气孔上钻孔，以通过游标效应实现放大的气体压力测量。实验结果表明，在0-0.8MPa范围内，气体压力灵敏度可提高到约-60nm/MPa。此外，该结构具有约0.55KPa/°C的低温交叉灵敏度。这种提出的传感器在气体压力检测、环境监测和其他工业应用中具有实际价值。
