基于液晶的法布里-珀罗干涉仪位移传感器。

Liquid-crystal based Fabry-Perot interferometer displacement sensor.

作者信息

Song Boyi, Hu Jianyang, Xia Chunli, Zhang Hai, Lu Yuelan, Sun Weimin, Liu Yongjun

出版信息

Appl Opt. 2019 Jan 10;58(2):410-414. doi: 10.1364/AO.58.000410.

DOI:10.1364/AO.58.000410

Abstract

A Fabry-Perot interferometer displacement sensor is proposed and demonstrated. This sensor is prepared by inserting two ceramic ferrules into a polydimethylsiloxane (PDMS) hose to generate a Fabry-Perot cavity. The cavity is filled with nematic liquid crystals (NLCs), which induce a Vernier effect due to the birefringence of NLCs. The flexible PDMS hose makes the cavity length adjustable. A displacement sensor with sensitivity of ∼2.97 nm/μm and a dynamic range of 0.9 mm at the center wavelength of 1550 nm is experimentally demonstrated.

摘要

提出并演示了一种法布里-珀罗干涉仪位移传感器。该传感器通过将两个陶瓷插芯插入聚二甲基硅氧烷（PDMS）软管中以产生法布里-珀罗腔体制备而成。腔内填充有向列型液晶（NLC），由于NLC的双折射会产生游标效应。柔性PDMS软管使腔长可调。在1550nm中心波长下，实验演示了一种灵敏度约为2.97nm/μm且动态范围为0.9mm的位移传感器。