用于微机电系统（MEMS）平面运动平台的光纤法布里-珀罗微位移传感器。
Optical fiber Fabry-Pérot micro-displacement sensor for MEMS in-plane motion stage.
作者信息
Kim Yong-Sik, Dagalakis Nicholas G, Choi Young-Man
机构信息
Intelligent Systems Division, Engineering Laboratory, National Institute of Standards and Technology, 100 Bureau Dr., Gaithersburg, MD 20899, USA.
Department of Mechanical Engineering, Ajou University, Suwon 16499, Republic of Korea.
出版信息
Microelectron Eng. 2018;187-188. doi: https://doi.org/10.1016/j.mee.2017.11.010.
Fabry-Pérot interferometer sensors have been widely used in Micro-Electro-Mechanical-Systems (MEMS) due to high displacement accuracy and immunity to electromagnetic noises, but they are still limited by micro scale measurement range. In this paper, a Fabry-Pérot interferometer in-plane displacement sensor is proposed for measuring the displacement of MEMS devices utilizing a polished optical fiber and a modulated laser source. The polished optical fiber and a sidewall of a MEMS device form an optical cavity for the proposed sensor. The sinusoidal phase modulation with extreme point search algorithm enables the proposed sensor to measure displacements larger than the wavelengths of the laser light in real time. The experimental results show that the proposed displacement sensor has a capability to measure displacements larger than 3 μm and it shows the measurement accuracy less than 35 nm. The proposed displacement sensor is then embedded on a single degree-of-freedom MEMS motion stage and tested to monitor its displacement in real time.
法布里-珀罗干涉仪传感器因其高位移精度和抗电磁噪声能力而在微机电系统（MEMS）中得到广泛应用，但它们仍受限于微尺度测量范围。本文提出一种法布里-珀罗干涉仪平面内位移传感器，用于利用抛光光纤和调制激光源测量MEMS器件的位移。抛光光纤与MEMS器件的侧壁形成了该传感器的光学腔。采用极值点搜索算法的正弦相位调制使该传感器能够实时测量大于激光波长的位移。实验结果表明，所提出的位移传感器具有测量大于3μm位移的能力，且测量精度小于35nm。然后将所提出的位移传感器嵌入到单自由度MEMS运动平台上进行测试，以实时监测其位移。
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