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太赫兹导模共振TE模式的介电薄膜传感

Dielectric film sensing with TE mode of terahertz guided-mode resonance.

作者信息

Bark Hyeon Sang, Jeon Tea-In

出版信息

Opt Express. 2018 Dec 24;26(26):34547-34556. doi: 10.1364/OE.26.034547.

DOI:10.1364/OE.26.034547
PMID:30650876
Abstract

Guided-mode resonance (GMR) filters were implemented by combining a monolayer grating made of polyethylene terephthalate (PET) and a slab waveguide (dielectric film) made of quartz, PET, and Teflon. The terahertz (THz) GMRs were measured and simulated for films with thickness change from 0 to 500 µm. As the thickness increased, the transverse-electric (TE) mode such as TE, TE, TE, and TE appeared sequentially. Because the magnitude and frequency of the GMRs depend on the films' absorption and thickness, we applied GMRs in order to sense the film's thickness of the film. When the GMR filter was measured, resonance depth and frequency changes according to the film thickness were much more sensitive than they were when only the film was measured using THz time-domain spectroscopy (THz-TDS).

摘要

通过将由聚对苯二甲酸乙二酯(PET)制成的单层光栅与由石英、PET和聚四氟乙烯制成的平板波导(介电膜)相结合,实现了导模共振(GMR)滤波器。对厚度从0到500 µm变化的薄膜进行了太赫兹(THz)GMR测量和模拟。随着厚度增加,诸如TE₀、TE₁、TE₂和TE₃等横向电(TE)模式依次出现。由于GMR的幅度和频率取决于薄膜的吸收和厚度,我们应用GMR来检测薄膜的厚度。当测量GMR滤波器时,与仅使用太赫兹时域光谱(THz - TDS)测量薄膜时相比,共振深度和频率随薄膜厚度的变化要敏感得多。

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