Dai Keren, Wang Xiaofeng, You Zheng, Zhang He
ZNDY of Ministerial Key Laboratory, School of Mechanical Engineering, Nanjing University of Science and Technology, Nanjing 210094, China.
Beijing Innovation Center for Future Chips, Department of Precision Instrument, Tsinghua University, Beijing 100084, China.
Micromachines (Basel). 2019 Jan 16;10(1):58. doi: 10.3390/mi10010058.
Microsystems with limited power supplies, such as electronic skin and smart fuzes, have a strong demand for self-powered pressure and impact sensors. In recent years, new self-powered mechanical sensors based on the piezoresistive characteristics of porous electrodes have been rapidly developed, and have unique advantages compared to conventional piezoelectric sensors. In this paper, in order to optimize the mechanical sensitivity of porous electrodes, a material preparation process that can enhance the piezoresistive characteristics is proposed. A flexible porous electrode with superior piezoresistive characteristics and elasticity was prepared by modifying the microstructure of the porous electrode material and adding an elastic rubber component. Furthermore, based on the porous electrode, a self-powered pressure sensor and an impact sensor were fabricated. Through experimental results, the response signals of the sensors present a voltage peak under such mechanical effects and the sensitive signal has less clutter, making it easy to identify the features of the mechanical effects.
对于诸如电子皮肤和智能引信等电源有限的微系统，对自供电压力和冲击传感器有强烈需求。近年来，基于多孔电极压阻特性的新型自供电机械传感器得到了快速发展，与传统压电传感器相比具有独特优势。本文为优化多孔电极的机械灵敏度，提出了一种可增强压阻特性的材料制备工艺。通过改变多孔电极材料的微观结构并添加弹性橡胶成分，制备出了具有优异压阻特性和弹性的柔性多孔电极。此外，基于该多孔电极制作了自供电压力传感器和冲击传感器。通过实验结果可知，传感器的响应信号在这种机械作用下呈现电压峰值，且敏感信号杂波较少，便于识别机械作用的特征。
