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采用仿生纹理多孔材料制备的高灵敏度柔性压阻压力传感器。

Highly Sensitive Flexible Piezoresistive Pressure Sensor Developed Using Biomimetically Textured Porous Materials.

机构信息

Key Laboratory of Advanced Display and System Application, Ministry of Education , Shanghai University , Shanghai , 200072 , China.

出版信息

ACS Appl Mater Interfaces. 2019 Aug 14;11(32):29466-29473. doi: 10.1021/acsami.9b09265. Epub 2019 Jul 31.

DOI:10.1021/acsami.9b09265
PMID:31291082
Abstract

In recent times, high-performance flexible pressure sensors that can be fabricated in an environmentally friendly and low-cost manner have received considerable attention owing to their potential applications in wearable health monitors and intelligent soft robotics. This paper proposes a highly sensitive flexible piezoresistive pressure sensor based on hybrid porous microstructures that can be designed and fabricated using a bio-inspired and low-cost approach employing the leaf and sugar as the template. The sensitivity and detection limit of the obtained pressure sensor can be as high and low as 83.9 kPa (<140 Pa) and 0.5 Pa, respectively. According to the mechanism and simulation analyses, the hybrid porous microstructures lower the effective elastic modulus of the sensor and introduce an additional pore resistance, which increases the contact area and conductive path with loads, thereby contributing to the high sensitivity that exceeds that of traditional microstructured pressure sensors. Real-time monitoring of human physiological signals such as finger pressing, voice vibration, swallowing activity, and wrist pulse is demonstrated for the proposed device. The high performance and easy fabrication of the hybrid porous microstructured sensor can encourage the development of a novel approach for the design and fabrication of future pressure sensors.

摘要

近年来,能够以环保且低成本的方式制造的高性能柔性压力传感器,由于其在可穿戴健康监测器和智能软机器人中的潜在应用而受到了极大的关注。本文提出了一种基于混合多孔微结构的高灵敏度柔性压阻压力传感器,该传感器可以使用仿生和低成本的方法设计和制造,使用叶子和糖作为模板。所获得的压力传感器的灵敏度和检测限可以分别高达 83.9 kPa(<140 Pa)和 0.5 Pa。根据机理和模拟分析,混合多孔微结构降低了传感器的有效弹性模量,并引入了额外的孔电阻,这增加了与负载的接触面积和导电路径,从而实现了超过传统微结构压力传感器的高灵敏度。该设备演示了对人体生理信号(如手指按压、声音振动、吞咽活动和手腕脉搏)的实时监测。混合多孔微结构传感器的高性能和易于制造可以鼓励设计和制造未来压力传感器的新方法的发展。

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