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基于宽带隙BaSnO - SrSnO固溶体的薄膜晶体管中热电功率调制对其工作机制的阐明

Thermopower Modulation Clarification of the Operating Mechanism in Wide Bandgap BaSnO -SrSnO Solid-Solution Based Thin Film Transistors.

作者信息

Sanchela Anup V, Wei Mian, Cho Hai Jun, Ohta Hiromichi

机构信息

Research Institute for Electronic Science, Hokkaido University, N20W10, Kita, Sapporo, 001-0020, Japan.

Graduate School of Information Science and Technology, Hokkaido University, N14W9, Kita, Sapporo, 060-0814, Japan.

出版信息

Small. 2019 Feb;15(8):e1805394. doi: 10.1002/smll.201805394. Epub 2019 Jan 30.

DOI:10.1002/smll.201805394
PMID:30698912
Abstract

The transparent oxide semiconductor (TOS) with large bandgap (E ≈ 4 eV) based thin-film transistors (TFTs) showing both high carrier mobility and UV-visible transparency has attracted increasing attention as a promising component for next generation optoelectronics. Among TOSs, BaSnO -SrSnO solid-solutions (E = 3.5-4.2 eV) are good candidates because the single crystal shows very high mobility. However, the TFT performance has not been optimized due to the lack of fundamental knowledge especially the effective thickness (t ) and the carrier effective mass (m*). Here, it is demonstrated that the electric field thermopower (S) modulation method addresses this problem by combining with the standard volume carrier concentration (n ) dependence of S measurements. By comparing the electric field accumulated sheet carrier concentration (n ) and n at same S, it is clarified that the t (n /n ) of the conducting channel becomes thicker with increasing Sr concentration, whereas the m* becomes lighter. The former would be due to the increase of E and latter would be due to the enhancement of overlap population of neighboring Sn 5s orbitals. The present analyses technique is useful to experimentally clarify the t and m*, and essentially important to realize advanced TOS-based TFTs showing both high optical transparency and high mobility.

摘要

具有大带隙(E≈4eV)的透明氧化物半导体(TOS)基薄膜晶体管(TFT)兼具高载流子迁移率和紫外 - 可见光透明度,作为下一代光电子学的一种有前景的组件,已引起越来越多的关注。在TOS中,BaSnO - SrSnO固溶体(E = 3.5 - 4.2eV)是很好的候选材料,因为其单晶表现出非常高的迁移率。然而,由于缺乏基础知识,特别是有效厚度(t)和载流子有效质量(m*),TFT的性能尚未得到优化。在此,证明了电场热功率(S)调制方法通过与S测量的标准体载流子浓度(n)依赖性相结合来解决这个问题。通过比较相同S下电场积累的面载流子浓度(n)和n,可以明确,随着Sr浓度的增加,导电沟道的t(n / n)变厚,而m变轻。前者归因于E的增加,后者归因于相邻Sn 5s轨道重叠布居的增强。目前的分析技术有助于通过实验阐明t和m,对于实现兼具高光学透明度和高迁移率的先进TOS基TFT至关重要。

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