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基于微机电系统（MEMS）测试元件对掺杂（K，Na）NbO₃的CaTiO₃薄膜材料常数的研究

Investigation of Material Constants of CaTiO₃ Doped (K,Na)NbO₃ Film by MEMS-Based Test Elements.

作者信息

Kaneko Ryosuke, Kadota Michio, Ohashi Yuji, Kushibiki Jun-Ichi, Ikeuchi Shinsuke, Tanaka Shuji

机构信息

Graduate School of Engineering, Tohoku University, 6-6 Aramaki aza, Aoba, Aoba-ku, Sendai, Miyagi 980-8579, Japan.

New Industry Creation Hatchery Center, Tohoku University, 6-6 Aramaki aza, Aoba, Aoba-ku, Sendai, Miyagi 980-8579, Japan.

出版信息

Micromachines (Basel). 2018 Oct 29;9(11):558. doi: 10.3390/mi9110558.

DOI:10.3390/mi9110558
PMID:30715057
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC6265785/
Abstract

A CaTiO₃-doped (K,Na)NbO₃ (KNN-CT) film is a lead-free piezoelectric film that is expected to substitute Pb(Zr,Ti)O₃ (PZT) film in piezoelectric micro electro mechanical systems (MEMS). However, the full set of the material constants (elastic constants, piezoelectric constants and dielectric constants) of the KNN-CT film have not been reported yet. In this study, all the material constants of a sputter-deposited blanket KNN-CT film were investigated by the resonance responses of MEMS-based piezoelectric resonators and the phase velocities of leaky Lamb waves on a self-suspended membrane. The phase velocities measured by a line-focus-beam ultrasonic material characterization (LFB-UMC) system at different frequencies were fitted with theoretical ones, which were calculated from the material constants, including fitting parameters. A genetic algorithm was used to find the best-fitting parameters. All the material constants were then calculated. Although some problems arising from the film quality and the nature of deliquescence are observed, all the material constants were obtained exhibiting accuracy within 16 m/s in the phase velocity of leaky Lamb wave.

摘要

钙钛矿掺杂的（钾，钠）铌酸盐（KNN-CT）薄膜是一种无铅压电薄膜，有望在压电微机电系统（MEMS）中替代锆钛酸铅（PZT）薄膜。然而，KNN-CT薄膜的全套材料常数（弹性常数、压电常数和介电常数）尚未见报道。在本研究中，通过基于MEMS的压电谐振器的共振响应以及自悬浮膜上泄漏兰姆波的相速度，研究了溅射沉积的KNN-CT覆盖膜的所有材料常数。用线聚焦束超声材料表征（LFB-UMC）系统在不同频率下测量的相速度与理论相速度进行拟合，理论相速度由包括拟合参数在内的材料常数计算得出。采用遗传算法寻找最佳拟合参数。然后计算所有材料常数。尽管观察到一些由薄膜质量和潮解性质引起的问题，但所有材料常数的泄漏兰姆波相速度精度均在16m/s以内。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/40af/6265785/e02ec600adb5/micromachines-09-00558-g016.jpg
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https://cdn.ncbi.nlm.nih.gov/pmc/blobs/40af/6265785/b61fc5830054/micromachines-09-00558-g013.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/40af/6265785/f946b20c8f3b/micromachines-09-00558-g014.jpg
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https://cdn.ncbi.nlm.nih.gov/pmc/blobs/40af/6265785/e02ec600adb5/micromachines-09-00558-g016.jpg

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