微机电系统装置中弹性梁延迟机构的设计与分析

Design and Analysis of the Elastic-Beam Delaying Mechanism in a Micro-Electro-Mechanical Systems Device.

作者信息

Wang Fufu, Zhang Lu, Li Long, Qiao Zhihong, Cao Qian

机构信息

Key Laboratory of Space Utilization, Technology and Engineering Center for space Utilization, Chinese Academy of Sciences, Beijing 100094, China.

Qian Xuesen Laboratory of Space Technology, NO. 104 Youyi Road, Haidian District, Beijing 100094, China.

出版信息

Micromachines (Basel). 2018 Nov 2;9(11):567. doi: 10.3390/mi9110567.

DOI:10.3390/mi9110567

PMID:30715066

原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC6267583/

Abstract

The delaying mechanism is an important part of micro-electro-mechanical systems (MEMS) devices. However, very few mechanical delaying mechanisms are available. In this paper, an elastic-beam delaying mechanism has been proposed innovatively through establishing a three-dimensional model of an elastic-beam delay mechanism, establishing the force and the parameters of an elastic-beam delay mechanism, deriving the mathematical model according to the rigid dynamic mechanics theory, establishing the finite element model by using Ls-dyna solver of the Ansys software, and carrying out the centrifugal test. Simulation and test results match theoretical results quite well. It is believed that the elastic-beam delaying mechanism is quite effective and useful to slow the speed of the movable part in MEMS devices.

摘要

延迟机构是微机电系统（MEMS）器件的重要组成部分。然而，可用的机械延迟机构非常少。本文通过建立弹性梁延迟机构的三维模型、确定弹性梁延迟机构的受力及参数、依据刚体动力学理论推导数学模型、使用Ansys软件的Ls-dyna求解器建立有限元模型以及进行离心测试，创新性地提出了一种弹性梁延迟机构。仿真和测试结果与理论结果吻合得很好。可以认为，弹性梁延迟机构对于降低MEMS器件中可动部件的速度非常有效且有用。