ACS Appl Mater Interfaces. 2019 Mar 6;11(9):9326-9332. doi: 10.1021/acsami.8b20860. Epub 2019 Feb 22.
In this work, plasmon-induced heterointerface thinning for Schottky barrier modification of core/shell SiC/SiO nanowires is conducted by femtosecond (fs) laser irradiation. The incident energy of polarized fs laser (50 fs, 800 nm) is confined in the SiO shell of the nanowire due to strong plasmonic localization in the region of the electrode-nanowire junction. With intense nonlinear absorption in SiO, the thickness of the SiO layer can be thinned in a controllable way. The tuning of the SiO barrier layer allows the promotion of electron transportation at the electrode-nanowire interface. The switching voltage of the rectifying junction made by the SiC/SiO nanowire can be significantly tuned from 15.7 to 1 V. When selectively thinning at source and drain electrodes and leaving the SiO barrier layer at the gate electrode intact, a metal/oxide/semiconductor (MOS) device is fabricated with low leakage current. This optically controlled interfacial engineering technology should be applicable for MOS components and other heterogeneous integration structures.
在这项工作中,通过飞秒(fs)激光辐照进行等离子体诱导的异质界面减薄,以修改核/壳 SiC/SiO 纳米线的肖特基势垒。由于在电极-纳米线结区域的强等离子体局域化,偏振飞秒激光(50fs,800nm)的入射能被限制在纳米线的 SiO 壳中。由于在 SiO 中存在强烈的非线性吸收,可以以可控的方式减薄 SiO 层的厚度。SiO 势垒层的调整可以促进电极-纳米线界面处的电子输运。由 SiC/SiO 纳米线制成的整流结的开关电压可以从 15.7 伏显著调节到 1 伏。当选择性地在源极和漏极处减薄,而在栅极电极处保留完整的 SiO 势垒层时,制造出具有低泄漏电流的金属/氧化物/半导体(MOS)器件。这种光控界面工程技术应该适用于 MOS 元件和其他异质集成结构。