Park So Jeong, Jeon Dae-Young, Sessi Violetta, Trommer Jens, Heinzig André, Mikolajick Thomas, Kim Gyu-Tae, Weber Walter M
Chair of Nanoelectronic Materials, TU Dresden, Noethnitzer Strasse 64, 01187 Dresden, Germany.
Center for Advancing Electronics Dresden (CfAED), 01062 Dresden, Germany.
ACS Appl Mater Interfaces. 2020 Sep 30;12(39):43927-43932. doi: 10.1021/acsami.0c12595. Epub 2020 Sep 16.
For use in flexible, printable, wearable electronics, Schottky-barrier field-effect transistors (SB-FETs) with various channel materials including low-dimensional nanomaterials have been considered so far due to their comparatively simple and cost-effective integration scheme free of junction and channel dopants. However, the electric conduction mechanism and the scaling properties underlying their performance differ significantly from those of conventional metal-oxide-semiconductor (MOS) field-effect transistors. Indeed, an understanding of channel length scaling and drain bias impact has not been elucidated sufficiently. Here, multiple ambipolar SB-FETs with different channel lengths have been fabricated on a single silicon nanowire ensuring a constant nanowire diameter. Their length scaling behavior is analyzed through drain current and transconductance contour maps, each depending on the drain and gate bias. The reduced gate control and extended drain field effect on Schottky junctions were observed in short channels. Activation energy measurements showed lower sensitive behavior of the Schottky barrier to gate bias in the short-channel device and confirmed the thinning of Schottky barrier width for electrons at the source interface with drain bias.
为了用于柔性、可印刷、可穿戴电子设备,到目前为止,具有包括低维纳米材料在内的各种沟道材料的肖特基势垒场效应晶体管(SB-FET)已被考虑,这是因为它们具有相对简单且经济高效的集成方案,无需结和沟道掺杂剂。然而,其导电机制以及性能背后的缩放特性与传统金属氧化物半导体(MOS)场效应晶体管有显著差异。实际上,对沟道长度缩放和漏极偏置影响的理解尚未得到充分阐明。在此,在确保硅纳米线直径恒定的情况下,在单根硅纳米线上制造了具有不同沟道长度的多个双极性SB-FET。通过漏极电流和跨导等高线图分析它们的长度缩放行为,每个等高线图都取决于漏极和栅极偏置。在短沟道中观察到肖特基结处栅极控制的减弱和漏极场效应的扩展。活化能测量表明,短沟道器件中肖特基势垒对栅极偏置的敏感行为较低,并证实了在源极界面处电子的肖特基势垒宽度随漏极偏置而变薄。