Tu Xuecou, Jiang Chengtao, Xiao Peng, Zhai Shimin, Jia Xiaoqing, Wu Yaqian, Meng Qingyu, Chen Boyan, Kang Lin, Chen Jian, Wu Peiheng
Opt Lett. 2019 Feb 15;44(4):1019-1022. doi: 10.1364/OL.44.001019.
This Letter demonstrates tunable NbN microbolometers operating in the terahertz frequency range. An asymmetric-coupled Fabry-Pérot cavity is constituted by simply placing a movable metallic planar mirror in the back of the silicon substrate. The incident THz radiation onto the NbN microbolometer is effectively manipulated by changing the air spacer gap to modulate the phase relation between the reflected wave and incident wave. The experimental measurements reveal that the detailed evolution of the resonance bands as a function of spacing is in excellent agreement with the analysis by using interference theory and simulation. The results detail the design of THz detectors wherein a wide degree of tunability or a variable number of detection bands is desirable.
这封信展示了工作在太赫兹频率范围内的可调谐氮化铌微测辐射热计。通过在硅衬底背面简单地放置一个可移动的金属平面镜，构成了一个非对称耦合法布里 - 珀罗腔。通过改变空气间隔间隙来调制反射波和入射波之间的相位关系，从而有效地控制入射到氮化铌微测辐射热计上的太赫兹辐射。实验测量结果表明，共振带随间距变化的详细演变与使用干涉理论和模拟进行的分析结果非常吻合。这些结果详细说明了太赫兹探测器的设计，其中需要宽范围的可调谐性或可变数量的检测带。
